| Presentation | 2001/7/26 AFM observations of epitaxially grown(III)HfN film and (III)Cu/(III)HfN bilayered film on (III)Si Satoko SHINKAI, Katsutaka SASAKI, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We evaluated the surface morphology of epitaxial(111)HfN and (001)HfN films, and epitaxial(111)Cu and single-oriented(110)Cu films grown on each epitaxial HfN film, by AFM. It was revealed that each epitaxial HfN film is very flat and has the same surface roughness with that of Si wafer, and epitaxital(111)Cu film on (111)HfN has only the peak-valley height between several atomic layer and a few decades atomic layer, in spite of the thickness of 200nm. In addition, single-oriented(110)Cu film on (001)HfN film was more smooth than that of the (111)Cu. There-fore, it is concluded that the application of epitaxial HfN films to the Cu metallization system is useful for realizing Cu films with the smooth surface as an overlayer. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | surface morphology / AFM / epitaxial HfN film / Cu metallization / surface roughness |
| Paper # | CPM2001-43 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2001/7/26(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | AFM observations of epitaxially grown(III)HfN film and (III)Cu/(III)HfN bilayered film on (III)Si |
| Sub Title (in English) | |
| Keyword(1) | surface morphology |
| Keyword(2) | AFM |
| Keyword(3) | epitaxial HfN film |
| Keyword(4) | Cu metallization |
| Keyword(5) | surface roughness |
| 1st Author's Name | Satoko SHINKAI |
| 1st Author's Affiliation | Reseach Fellow of the Japan Society for the Promotion of Science(PD)() |
| 2nd Author's Name | Katsutaka SASAKI |
| 2nd Author's Affiliation | Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology, Koen-cho 165, Kitami 090-8507, Japan |
| Date | 2001/7/26 |
| Paper # | CPM2001-43 |
| Volume (vol) | vol.101 |
| Number (no) | 244 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |