| Presentation | 2001/7/26 Fundamental behavior of vacancies attributed to stress-induced migration Minoru Aoyagi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The stress-induced migration phenomenon is one of the problems related to the reliability of metal interconnections on semiconductor devices. The phenomenon causes voids and fractures in the interconnections when devices are maintained at high temperatures for long periods. The purpose of this paper is to clarify the mechanism of phenomenon. First, on a spherical metal sample with a spherical void, vacancy absorption or emission was considered between the void surface and the sample surface. Next, vacancy behavior on the sample with applied external stress was analyzed in order to clarify the vacancy behavior under thermal stress. These results reveal that the surface of the void or the sample becomes a vacancy sink or a vacancy source depending on the relative value among the sample surface stress, the void surface stress and the external stress. Lastly, the physical model was proposed in order to adapt these results to the stress-induced migration phenomenon. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | stress / migration / mechanism / vacancy / void / stress |
| Paper # | CPM2001-42 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2001/7/26(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fundamental behavior of vacancies attributed to stress-induced migration |
| Sub Title (in English) | |
| Keyword(1) | stress |
| Keyword(2) | migration |
| Keyword(3) | mechanism |
| Keyword(4) | vacancy |
| Keyword(5) | void |
| Keyword(6) | stress |
| 1st Author's Name | Minoru Aoyagi |
| 1st Author's Affiliation | Department of Electrical and Electronic Engineering, Tomakomai National College of Technology() |
| Date | 2001/7/26 |
| Paper # | CPM2001-42 |
| Volume (vol) | vol.101 |
| Number (no) | 244 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |