| Presentation | 2001/6/29 A Study on Fabrication of SAW Devices with EB Photolithography H. Ozawa, S. Nakagomi, T. Omori, K. Hashimoto, M. Yamaguchi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Rapid development of SAW devices requires to shorten development period. This paper discusses applicability of EB photolithography based on the scanning electron microscope(SEM) to reduce the time required for the development of prototype devices. In addition to the wet etching process, the lift-off process with an antistatic coating was discussed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | EB photolithography / wet etching / lift-off process |
| Paper # | US2001-30, EMD2001-22 CPM2001-37, OME2001-32 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2001/6/29(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | A Study on Fabrication of SAW Devices with EB Photolithography |
| Sub Title (in English) | |
| Keyword(1) | EB photolithography |
| Keyword(2) | wet etching |
| Keyword(3) | lift-off process |
| 1st Author's Name | H. Ozawa |
| 1st Author's Affiliation | Graduate School of Science and Technology, Chiba University() |
| 2nd Author's Name | S. Nakagomi |
| 2nd Author's Affiliation | Graduate School of Science and Technology, Chiba University |
| 3rd Author's Name | T. Omori |
| 3rd Author's Affiliation | Dept.Electronics and Mechanical Eng., Chiba University |
| 4th Author's Name | K. Hashimoto |
| 4th Author's Affiliation | Dept.Electronics and Mechanical Eng., Chiba University |
| 5th Author's Name | M. Yamaguchi |
| 5th Author's Affiliation | Dept.Electronics and Mechanical Eng., Chiba University |
| Date | 2001/6/29 |
| Paper # | US2001-30, EMD2001-22 CPM2001-37, OME2001-32 |
| Volume (vol) | vol.101 |
| Number (no) | 170 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |