| Presentation | 2001/6/29 Influence of Sintering Condition in Sol-Gel Derived Piezoelectric PZT Thin Films T. Nagoya, T. Suzuki, T. Omori, K. Hashimoto, M. Yamaguchi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | This paper described influence of the sintering condition for the sol-gel deposition of piezoelectric lead zirconate titanate (PZT) films. Their crystallographic and piezoelectric characteristics are very dependent upon not only the sintering time but also the atmosphere. Under taking their influence to the buffer metal layer into account, the optimal deposition condition was derived. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | PZT / Sol-gel method / Sintering time / O_2 gas / Buffer layer |
| Paper # | US2001-29, EMD2001-21 CPM2001-36, OME2001-31 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2001/6/29(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Influence of Sintering Condition in Sol-Gel Derived Piezoelectric PZT Thin Films |
| Sub Title (in English) | |
| Keyword(1) | PZT |
| Keyword(2) | Sol-gel method |
| Keyword(3) | Sintering time |
| Keyword(4) | O_2 gas |
| Keyword(5) | Buffer layer |
| 1st Author's Name | T. Nagoya |
| 1st Author's Affiliation | Dept.Electronics and Mechanical Eng., Chiba University() |
| 2nd Author's Name | T. Suzuki |
| 2nd Author's Affiliation | Graduate School of Science and Technology, Chiba University |
| 3rd Author's Name | T. Omori |
| 3rd Author's Affiliation | Dept.Electronics and Mechanical Eng., Chiba University |
| 4th Author's Name | K. Hashimoto |
| 4th Author's Affiliation | Dept.Electronics and Mechanical Eng., Chiba University |
| 5th Author's Name | M. Yamaguchi |
| 5th Author's Affiliation | Dept.Electronics and Mechanical Eng., Chiba University |
| Date | 2001/6/29 |
| Paper # | US2001-29, EMD2001-21 CPM2001-36, OME2001-31 |
| Volume (vol) | vol.101 |
| Number (no) | 170 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |