Presentation | 2001/6/29 The Fabrication of Organic/Inorganic Multilayer by Nano Scale QCM Feedback Control in Wet Process Takahiro Ito, Seimei Shiratori, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Sequential adsorption process by using quartz crystal microbalance (QCM) method was successfully monitoring the adsorption of polyelectrolytes to the substrate. The method we reported previously was controlling the thickness of film by frequency shift in polyion solution. However the growth of each films was not constant. To improve the growth of films, strong polyelectrolyte was added to the surface of the substrate as a buffer layer and the diposition algorithm was changed to monitor the adsorbing mass at each block of layer. From the result of frequency shift of QCM, transmittance electron microscope (TEM) and ellipsometer, the thickness of film was precisely controlled. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | sequential adsorption process / QCM / mass-control / polyelectrolyte / multilayer |
Paper # | US2001-24, EMD2001-16 CPM2001-31, OME2001-26 |
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Conference Information | |
Committee | CPM |
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Conference Date | 2001/6/29(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | |
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Assistant |
Paper Information | |
Registration To | Component Parts and Materials (CPM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | The Fabrication of Organic/Inorganic Multilayer by Nano Scale QCM Feedback Control in Wet Process |
Sub Title (in English) | |
Keyword(1) | sequential adsorption process |
Keyword(2) | QCM |
Keyword(3) | mass-control |
Keyword(4) | polyelectrolyte |
Keyword(5) | multilayer |
1st Author's Name | Takahiro Ito |
1st Author's Affiliation | Keio University() |
2nd Author's Name | Seimei Shiratori |
2nd Author's Affiliation | Keio University |
Date | 2001/6/29 |
Paper # | US2001-24, EMD2001-16 CPM2001-31, OME2001-26 |
Volume (vol) | vol.101 |
Number (no) | 170 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |