Presentation 2001/6/29
The Fabrication of Organic/Inorganic Multilayer by Nano Scale QCM Feedback Control in Wet Process
Takahiro Ito, Seimei Shiratori,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Sequential adsorption process by using quartz crystal microbalance (QCM) method was successfully monitoring the adsorption of polyelectrolytes to the substrate. The method we reported previously was controlling the thickness of film by frequency shift in polyion solution. However the growth of each films was not constant. To improve the growth of films, strong polyelectrolyte was added to the surface of the substrate as a buffer layer and the diposition algorithm was changed to monitor the adsorbing mass at each block of layer. From the result of frequency shift of QCM, transmittance electron microscope (TEM) and ellipsometer, the thickness of film was precisely controlled.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) sequential adsorption process / QCM / mass-control / polyelectrolyte / multilayer
Paper # US2001-24, EMD2001-16 CPM2001-31, OME2001-26
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Conference Information
Committee CPM
Conference Date 2001/6/29(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) The Fabrication of Organic/Inorganic Multilayer by Nano Scale QCM Feedback Control in Wet Process
Sub Title (in English)
Keyword(1) sequential adsorption process
Keyword(2) QCM
Keyword(3) mass-control
Keyword(4) polyelectrolyte
Keyword(5) multilayer
1st Author's Name Takahiro Ito
1st Author's Affiliation Keio University()
2nd Author's Name Seimei Shiratori
2nd Author's Affiliation Keio University
Date 2001/6/29
Paper # US2001-24, EMD2001-16 CPM2001-31, OME2001-26
Volume (vol) vol.101
Number (no) 170
Page pp.pp.-
#Pages 6
Date of Issue