Presentation 2001/5/18
Fabrication and Proposition of High Sensitive Chemical Potential Sensor Used Charge Transfer Technique
Kazuaki Sawada, Hidekuni Takao, Makoto Ishida,
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Abstract(in English) AMIS (Accumulation Method Ion Sensor), which is expected as high sensitive ion sensor, is proposed and prototype one is fabricated using a CCD process. The principle of the AMIS is based on the charge transfer techniques. The AMIS is operated in a signal integration mode. Charges corresponded to pH value is transferred from a sensing part to the floating diffusion region on several times, and the signal charges are accumulated in the floating diffusion region. It is expected that the SNR of the pH information increases √n times, as the signal is integrated n times. The output signal of a sensing part was measured by using the equivalent voltages. It was found that the output signal from AMPS, which was integrated 5 times, was lineally changed and the total sensitivity was 1.7V/pH.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) ISFET / Charge Transfer / Ion sensor / pH sensor / CCD
Paper # ED2001-39,CPM2001-26,SDM2001-39
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Committee CPM
Conference Date 2001/5/18(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication and Proposition of High Sensitive Chemical Potential Sensor Used Charge Transfer Technique
Sub Title (in English)
Keyword(1) ISFET
Keyword(2) Charge Transfer
Keyword(3) Ion sensor
Keyword(4) pH sensor
Keyword(5) CCD
1st Author's Name Kazuaki Sawada
1st Author's Affiliation Department of Electrical and Electronic Engineering Toyohashi University of Technology()
2nd Author's Name Hidekuni Takao
2nd Author's Affiliation Department of Electrical and Electronic Engineering Toyohashi University of Technology
3rd Author's Name Makoto Ishida
3rd Author's Affiliation Department of Electrical and Electronic Engineering Toyohashi University of Technology
Date 2001/5/18
Paper # ED2001-39,CPM2001-26,SDM2001-39
Volume (vol) vol.101
Number (no) 81
Page pp.pp.-
#Pages 5
Date of Issue