| Presentation | 2001/5/18 Optimization of Simulation Parameters for Phosphorus and Boron Diffusion Daisuke Iida, Hiroshi Asai, Hideo Uchida, Masaya Ichimura, Eisuke Arai, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We carried out parameter fitting to measured phosphorus and boron predeposition profiles in bulk silicon, using process simulation (TSUPREM-4). When diffusion parameters are default coefficients, we found deviation of simulated results from measured profiles. For improvement of the simulated results, we changed the simulation parameter of f_ |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Diffusion simulation / Phosphorus / Boron / Interstitial silicon / SOI |
| Paper # | ED2001-37,CPM2001-24,SDM2001-37 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2001/5/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Optimization of Simulation Parameters for Phosphorus and Boron Diffusion |
| Sub Title (in English) | |
| Keyword(1) | Diffusion simulation |
| Keyword(2) | Phosphorus |
| Keyword(3) | Boron |
| Keyword(4) | Interstitial silicon |
| Keyword(5) | SOI |
| 1st Author's Name | Daisuke Iida |
| 1st Author's Affiliation | Department of Electrical and Computer Engineering, Nagoya Institute of Technology() |
| 2nd Author's Name | Hiroshi Asai |
| 2nd Author's Affiliation | Department of Electrical and Computer Engineering, Nagoya Institute of Technology |
| 3rd Author's Name | Hideo Uchida |
| 3rd Author's Affiliation | Department of Electrical and Computer Engineering, Nagoya Institute of Technology |
| 4th Author's Name | Masaya Ichimura |
| 4th Author's Affiliation | Department of Electrical and Computer Engineering, Nagoya Institute of Technology |
| 5th Author's Name | Eisuke Arai |
| 5th Author's Affiliation | Department of Electrical and Computer Engineering, Nagoya Institute of Technology |
| Date | 2001/5/18 |
| Paper # | ED2001-37,CPM2001-24,SDM2001-37 |
| Volume (vol) | vol.101 |
| Number (no) | 81 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |