Presentation 2001/5/17
Arsenic doping in CdTe layers grown by metalorganic vapor phase epitaxy
Yusuke Masuda, Yasumitsu Tomita, Tomoaki Ishiguro, Yasuhiro Kawauchi, Kazuki Hoki, Hiroshi Morishita, Kazuhito Yasuda,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Characteristics of arsenic doping in CdTe layers on (100)GaAs have been studied in MOVPE using tertialybutylarsine(TBAs) as a p-type dopant. Dimethylcadmium(DMCd), diethyltelluride (DETe) and diisopropyltelluride(DiPTe) were used as precursors. Hole densities of doped layers were controlled from 10^<14> to 10^<17>cm^<-3>. Effect of doping on the growth characterisics was also studied.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) MOVPE / doping characteristics / DMCd / DETe / DiPTe / TBAs
Paper # ED2001-16,CPM2001-3,SDM2001-16
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Conference Information
Committee CPM
Conference Date 2001/5/17(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Arsenic doping in CdTe layers grown by metalorganic vapor phase epitaxy
Sub Title (in English)
Keyword(1) MOVPE
Keyword(2) doping characteristics
Keyword(3) DMCd
Keyword(4) DETe
Keyword(5) DiPTe
Keyword(6) TBAs
1st Author's Name Yusuke Masuda
1st Author's Affiliation Department of Electrical and Computer Engineering Nagoya Institute of Technology()
2nd Author's Name Yasumitsu Tomita
2nd Author's Affiliation Department of Electrical and Computer Engineering Nagoya Institute of Technology
3rd Author's Name Tomoaki Ishiguro
3rd Author's Affiliation Department of Electrical and Computer Engineering Nagoya Institute of Technology
4th Author's Name Yasuhiro Kawauchi
4th Author's Affiliation Department of Electrical and Computer Engineering Nagoya Institute of Technology
5th Author's Name Kazuki Hoki
5th Author's Affiliation Department of Electrical and Computer Engineering Nagoya Institute of Technology
6th Author's Name Hiroshi Morishita
6th Author's Affiliation Department of Electrical and Computer Engineering Nagoya Institute of Technology
7th Author's Name Kazuhito Yasuda
7th Author's Affiliation Department of Electrical and Computer Engineering Nagoya Institute of Technology
Date 2001/5/17
Paper # ED2001-16,CPM2001-3,SDM2001-16
Volume (vol) vol.101
Number (no) 80
Page pp.pp.-
#Pages 6
Date of Issue