| Presentation | 2001/3/16 Sample Preparation Technique for Failure Analysis. Shinji Nakamura, Shigeru Nakajima, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | This paper describes a samplep reparation technique to improve the obserbabirity of failure site of device and wire repair technique for LSI design verification. A partial remove of wide upper metal wire, fabrication of inclined grooves that is reflection mirror of light emission, and bacd side preparation for the back-side light emission microscopy are useful techniques for little light emission is detected from front side of device. Anisotropic etching by RIE is also useful for EB probing or multilay er wiring. A cross-sectional TEM preparation using FIB, SEM observation preparation using lapping and selective wet-etching fabrication are very effective technique for micro-structure analysis of minimized and multilayeered LSI and flip-chip packaged device. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | LSI Failure analysis / Back side light emissin microscopy / Reactive ion etching / X-TEM / FIB / EB testing |
| Paper # | R2000-48,CPM2000-171 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2001/3/16(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Sample Preparation Technique for Failure Analysis. |
| Sub Title (in English) | |
| Keyword(1) | LSI Failure analysis |
| Keyword(2) | Back side light emissin microscopy |
| Keyword(3) | Reactive ion etching |
| Keyword(4) | X-TEM |
| Keyword(5) | FIB |
| Keyword(6) | EB testing |
| 1st Author's Name | Shinji Nakamura |
| 1st Author's Affiliation | NTT Electronics Corporation() |
| 2nd Author's Name | Shigeru Nakajima |
| 2nd Author's Affiliation | NTT Electronics Corporation |
| Date | 2001/3/16 |
| Paper # | R2000-48,CPM2000-171 |
| Volume (vol) | vol.100 |
| Number (no) | 707 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |