| Presentation | 2000/12/1 Layout Design for LSI Circuit Modification Norio KUJI, Tadao TAKEDA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Novel LSI design method has been proposed in order to reduce editing time and deposition resistivity of multilevel wires by FIB or laser CVD. In this method, modification elements, which consist of a pair of staked vias and a top-layer wire connecting the vias, are placed in unoccupied areas of LSI layout data. Placement positions of the elements and editing procedure corresponding to netlist revision specifications are automatically generated. It has been proved that this method can be used practically, because of demonstrating more than 90% placement ratio and at most 7.9% increase in capacitive load due to the placement. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Circuit editing / FIB / Laser CVD / planarization process / stacked via |
| Paper # | CPM2000-143,ICD2000-176 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2000/12/1(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Layout Design for LSI Circuit Modification |
| Sub Title (in English) | |
| Keyword(1) | Circuit editing |
| Keyword(2) | FIB |
| Keyword(3) | Laser CVD |
| Keyword(4) | planarization process |
| Keyword(5) | stacked via |
| 1st Author's Name | Norio KUJI |
| 1st Author's Affiliation | NTT Electronics Co.() |
| 2nd Author's Name | Tadao TAKEDA |
| 2nd Author's Affiliation | Nippon Telegraph & Telephone Co. |
| Date | 2000/12/1 |
| Paper # | CPM2000-143,ICD2000-176 |
| Volume (vol) | vol.100 |
| Number (no) | 486 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |