Presentation | 2000/12/1 Defect portion detection and it's mode classification in CMOS manufacturing process using fault diagnosis technique by I_ Masaru Sanada, Kazuo Uehira, Eigo Fuse, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We have developed the diagnosis system to detect the fatal defect portions by using abnormal I_ |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | LSI / I_ |
Paper # | CPM2000-142,ICD2000-175 |
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Conference Information | |
Committee | CPM |
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Conference Date | 2000/12/1(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
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Paper Information | |
Registration To | Component Parts and Materials (CPM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Defect portion detection and it's mode classification in CMOS manufacturing process using fault diagnosis technique by I_ |
Sub Title (in English) | |
Keyword(1) | LSI |
Keyword(2) | I_ |
Keyword(3) | Visual Abnormalities |
Keyword(4) | Fault Diagnosis |
Keyword(5) | Manufacturing Process |
1st Author's Name | Masaru Sanada |
1st Author's Affiliation | Analysis Technology Development Division, NEC Corporation() |
2nd Author's Name | Kazuo Uehira |
2nd Author's Affiliation | 3rd System LSI Division, NEC Corporation |
3rd Author's Name | Eigo Fuse |
3rd Author's Affiliation | LSI Manufacturing Division, NEC Corporation |
Date | 2000/12/1 |
Paper # | CPM2000-142,ICD2000-175 |
Volume (vol) | vol.100 |
Number (no) | 486 |
Page | pp.pp.- |
#Pages | 7 |
Date of Issue |