| Presentation | 2000/10/20 Generation of NH_3 Plasma Using a Helical Antenna and an Attempt of Nitrization of Semiconductor Surfaces Tatsurou ARAYAMA, Satoshi OKUTANI, Kanji YASUI, Masashi AKAHANE, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | NH_3 plasma was generated by a helical antenna under magnetic foeld. Plasma parameters such as electron density and electron temperature were measured using an RF compensated Langmuir probe. The optical emission spectra were measured to evaluate the variation in the densities of activated species such as radicals, ions and atoms. From the dependence of the plasma density on the RF power, mode jump was confirmed. Nitridation of GaAs(100)was carried out in the high density NH_3 plasma. Chemical bonding structure of nitrided layer was measured by X-ray photoelectron spectroscopy. Insulating properties were measured by current-voltage and capacitance-voltage characteristics. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Helical antenna / NH_3 plasma / GaAs / surface nitrization |
| Paper # | CPM2000-131 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2000/10/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Generation of NH_3 Plasma Using a Helical Antenna and an Attempt of Nitrization of Semiconductor Surfaces |
| Sub Title (in English) | |
| Keyword(1) | Helical antenna |
| Keyword(2) | NH_3 plasma |
| Keyword(3) | GaAs |
| Keyword(4) | surface nitrization |
| 1st Author's Name | Tatsurou ARAYAMA |
| 1st Author's Affiliation | Department of Electrical Engineering, Nagaoka University of Technology() |
| 2nd Author's Name | Satoshi OKUTANI |
| 2nd Author's Affiliation | Department of Electrical Engineering, Nagaoka University of Technology |
| 3rd Author's Name | Kanji YASUI |
| 3rd Author's Affiliation | Department of Electrical Engineering, Nagaoka University of Technology |
| 4th Author's Name | Masashi AKAHANE |
| 4th Author's Affiliation | Department of Electrical Engineering, Nagaoka University of Technology |
| Date | 2000/10/20 |
| Paper # | CPM2000-131 |
| Volume (vol) | vol.100 |
| Number (no) | 396 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |