| Presentation | 2000/10/19 Bulk Acoustic Wave Resonators using ZnO Piezoelectric Thin Films : Challenge of zero temperature characteristics of frequency in various frequency ranges Yukio Yoshino, Masaki Takeuchi, Kazuhiro Inoue, Takahiro Makino, Seiichi Arai, Tomonobu Hata, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Both 3.58MHz and 200MHz piezoelectric bulk acoustic wave resonators have been fabricated by using ZnO thin films. ELINVER alloy, which is known to control its temperature characteristics of frequency by changing heat-annealing temperature, was used as the substrate of the 3.58MHz resonator, and SiO_2, which has plus temperature characteristics of frequency, is also used as the bottom layer for the 200MHz resonator. Both 3.58MHz and 200MHz resonators show good resonant characteristics and temerature characteristics of frequency. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | zinc oxide / piezoelectric thin film / resonator / Elinver temperature characteristics of frequency |
| Paper # | CPM2000-125 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2000/10/19(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
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| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Bulk Acoustic Wave Resonators using ZnO Piezoelectric Thin Films : Challenge of zero temperature characteristics of frequency in various frequency ranges |
| Sub Title (in English) | |
| Keyword(1) | zinc oxide |
| Keyword(2) | piezoelectric thin film |
| Keyword(3) | resonator |
| Keyword(4) | Elinver temperature characteristics of frequency |
| 1st Author's Name | Yukio Yoshino |
| 1st Author's Affiliation | () |
| 2nd Author's Name | Masaki Takeuchi |
| 2nd Author's Affiliation | / |
| 3rd Author's Name | Kazuhiro Inoue |
| 3rd Author's Affiliation | / |
| 4th Author's Name | Takahiro Makino |
| 4th Author's Affiliation | Graduate School of Natural Science and Technolory, Kanazawa University |
| 5th Author's Name | Seiichi Arai |
| 5th Author's Affiliation | |
| 6th Author's Name | Tomonobu Hata |
| 6th Author's Affiliation | |
| Date | 2000/10/19 |
| Paper # | CPM2000-125 |
| Volume (vol) | vol.100 |
| Number (no) | 395 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |