Presentation | 2000/10/19 Growth and electric properties of selective B dope Si/Ge periodic structure prepared by ion beam sputtering Masafumi Kaimori, Yukihiro Takahashi, Yasunori Nabetani, Kimihiro Sasaki, Tomonobu Hata, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We tried to prepare heavily and selective B doped Si/Ge periodic structures on Si substrates by ion-beam sputtering. We observed that epitaxial growth of B doped Si/Ge periodic structures started at around 450℃ by the RHEED observation in spite that B was doped as heavily as 2.5×10^<21>cm^<-3> and that a periodic structure remained up to 500℃ by XRD analysis. For a B doped SiGe film a Hall mobility of 400cm^2/Vs was obtained at a hole concentration of 4×10^<17>cm^<-3> by Hall effect measurement. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Ion-beam sputtering / Lattice match / Heavily B-doping / Si/Ge periodic structure |
Paper # | CPM2000-118 |
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Conference Information | |
Committee | CPM |
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Conference Date | 2000/10/19(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Registration To | Component Parts and Materials (CPM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Growth and electric properties of selective B dope Si/Ge periodic structure prepared by ion beam sputtering |
Sub Title (in English) | |
Keyword(1) | Ion-beam sputtering |
Keyword(2) | Lattice match |
Keyword(3) | Heavily B-doping |
Keyword(4) | Si/Ge periodic structure |
1st Author's Name | Masafumi Kaimori |
1st Author's Affiliation | Graduate School of Natural Science & Technology Kanazawa University() |
2nd Author's Name | Yukihiro Takahashi |
2nd Author's Affiliation | Graduate School of Natural Science & Technology Kanazawa University |
3rd Author's Name | Yasunori Nabetani |
3rd Author's Affiliation | Graduate School of Natural Science & Technology Kanazawa University |
4th Author's Name | Kimihiro Sasaki |
4th Author's Affiliation | Graduate School of Natural Science & Technology Kanazawa University |
5th Author's Name | Tomonobu Hata |
5th Author's Affiliation | Graduate School of Natural Science & Technology Kanazawa University |
Date | 2000/10/19 |
Paper # | CPM2000-118 |
Volume (vol) | vol.100 |
Number (no) | 395 |
Page | pp.pp.- |
#Pages | 8 |
Date of Issue |