Presentation | 2000/6/30 Study of Analysis of Gas Sensor Response based on Quartz Crystal Microbalance Atsushi Saitoh, Tooru Nomura, Yukihiro Asari, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Gas molecule adsorption characteristics of a sensing film on Quartz Crystal Microbalance gas sensor were tried to make to the numerical value by analyzing the time series data of the sensor response. Gas molecule adsorption process to the sensing film was modeled based on the Langmuir adsorption theory, and an equation expressed the process was led. Curve fit between the obtained equation and measured actual sensor response was done by the least square method. It was shown to be able to express the sensor response by the equation, enough. And, the parameters obtained as a result of the analysis become the numerical value which showed the gas molecule adsorption characteristic of the sensing film. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Quartz Crystal Resonator / Gas Sensor / Response Analysis |
Paper # | US2000-31,EMD2000-27,CPM2000-42,OME2000-37 |
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Conference Information | |
Committee | CPM |
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Conference Date | 2000/6/30(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Component Parts and Materials (CPM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Study of Analysis of Gas Sensor Response based on Quartz Crystal Microbalance |
Sub Title (in English) | |
Keyword(1) | Quartz Crystal Resonator |
Keyword(2) | Gas Sensor |
Keyword(3) | Response Analysis |
1st Author's Name | Atsushi Saitoh |
1st Author's Affiliation | Shibaura Institute of Technology() |
2nd Author's Name | Tooru Nomura |
2nd Author's Affiliation | Shibaura Institute of Technology |
3rd Author's Name | Yukihiro Asari |
3rd Author's Affiliation | Shibaura Institute of Technology |
Date | 2000/6/30 |
Paper # | US2000-31,EMD2000-27,CPM2000-42,OME2000-37 |
Volume (vol) | vol.100 |
Number (no) | 166 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |