| Presentation | 2000/5/12 Study on the LPE growth of InGaAs pyramidal layers on(100)GaAs substrates K Balakrishnan, S Iida, T Koyama, M Kumagawa, Y Hayakawa, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Growth of In_xGa_<1-x>As(x=0.06)layers on various types of patterned(100)GaAs substrates by liquid phase epitaxy(LPE)has been investigated. Non-planar InGaAs layer having filled tent-like structure was grown on non-patterned substrate. When the InGaAs was grown on circular patterned substrate, a non-hollow pyramid structure was obtained. Perfect hollow pyramid structured InGaAs was found to be grown on trench-substrates of(100)GaAs. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | LPE / InGaAs / (100)GaAs substrate / pyramid stucture |
| Paper # | ED2000-43, CPM2000-28, SDM2000-43 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
|---|---|
| Conference Date | 2000/5/12(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Study on the LPE growth of InGaAs pyramidal layers on(100)GaAs substrates |
| Sub Title (in English) | |
| Keyword(1) | LPE |
| Keyword(2) | InGaAs |
| Keyword(3) | (100)GaAs substrate |
| Keyword(4) | pyramid stucture |
| 1st Author's Name | K Balakrishnan |
| 1st Author's Affiliation | Research Institute of Electronics, Shizuoka University() |
| 2nd Author's Name | S Iida |
| 2nd Author's Affiliation | Research Institute of Electronics, Shizuoka university |
| 3rd Author's Name | T Koyama |
| 3rd Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 4th Author's Name | M Kumagawa |
| 4th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| 5th Author's Name | Y Hayakawa |
| 5th Author's Affiliation | Research Institute of Electronics, Shizuoka University |
| Date | 2000/5/12 |
| Paper # | ED2000-43, CPM2000-28, SDM2000-43 |
| Volume (vol) | vol.100 |
| Number (no) | 60 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |