| Presentation | 2000/5/12 Growth of InGaAs layer on GaAs off substrates by metal organic chemical vapor deposition M Masuda, K Kuwahara, S Fuke, Y Takano, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have investigated InGaAs layers grown on GaAs(100)just substrates and on GaAs(100)substrates misoriented 2゜toward[001]using graded buffer layers by metal organic chemical vapor deposition. The crosshatch pattem was observed for In_<0.15>Ga_<0.85>As and In_<0.2>Ga_<0.8>As layers, and step flow growth was confirmed for the layers on misoriented substrates by atomic force microscopy. The employment of misoriented substrates decreased the FWHM of the x-ray rocking curve of the InGaAs layer and increased the radius of curvature of the sample. But no effect of substrate misorientation on and the radius of curvature of the In_<0.38>Ga_<0.62>As and In_<0.51>Ga_<0.49>As was observed. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | InGaAs / MOCVD / graded buffer / misoriented substrate / FWHM / radius of curvature |
| Paper # | ED2000-41, CPM2000-26, SDM2000-41 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 2000/5/12(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Growth of InGaAs layer on GaAs off substrates by metal organic chemical vapor deposition |
| Sub Title (in English) | |
| Keyword(1) | InGaAs |
| Keyword(2) | MOCVD |
| Keyword(3) | graded buffer |
| Keyword(4) | misoriented substrate |
| Keyword(5) | FWHM |
| Keyword(6) | radius of curvature |
| 1st Author's Name | M Masuda |
| 1st Author's Affiliation | Department of Electronics, Faculty of Engineering, Shizuoka University() |
| 2nd Author's Name | K Kuwahara |
| 2nd Author's Affiliation | Department of Electronics, Faculty of Engineering, Shizuoka University |
| 3rd Author's Name | S Fuke |
| 3rd Author's Affiliation | Department of Electronics, Faculty of Elgineering, Shizuoka University |
| 4th Author's Name | Y Takano |
| 4th Author's Affiliation | Department of Electronics, Faculty of Engineering, Shizuoka University |
| Date | 2000/5/12 |
| Paper # | ED2000-41, CPM2000-26, SDM2000-41 |
| Volume (vol) | vol.100 |
| Number (no) | 60 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |