Presentation | 2000/5/12 Industry growth process of nitrogen at oxynitridation, and effect to the composition of film Akira Kawasaki, Masayuki Suzuki, Yoji Saito, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Although silicon oxynitride films have drawn attention as high-quality gate dielectrics, their growth process is not clear. In this work, we tried direct oxynitridation of silicon by excited oxygen gaseous afterward nitridation of silicon by excited nitrogen gaseous, and to investigate the existing structures of nitrogen by angle resoleved x-ray photoelectron spectroscopy. Bonding structures of nitrogen and silicon become N-Si_3 bonding becomes to dominate the surface structure at 700℃, but N-Si_2 and N-Si bonding structures which are not stable become to increase at 800℃.But silicon nitride films becones to firm because Si-N bonding hands exist that nitrogen concentration don't decrease. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | oxynitride film / excited nitrogen / excited oxygen / angle resolved x-ray photoelectron spectroscopy |
Paper # | ED2000-37, CPM2000-22, SDM2000-37 |
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Conference Information | |
Committee | CPM |
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Conference Date | 2000/5/12(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Component Parts and Materials (CPM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Industry growth process of nitrogen at oxynitridation, and effect to the composition of film |
Sub Title (in English) | |
Keyword(1) | oxynitride film |
Keyword(2) | excited nitrogen |
Keyword(3) | excited oxygen |
Keyword(4) | angle resolved x-ray photoelectron spectroscopy |
1st Author's Name | Akira Kawasaki |
1st Author's Affiliation | Department of Electric Engineering and Electronics, Faculty of Engineering, Seikei University() |
2nd Author's Name | Masayuki Suzuki |
2nd Author's Affiliation | Department of Electric Emgineering and Ekectronics, Faculty of Engineering, Seikei University |
3rd Author's Name | Yoji Saito |
3rd Author's Affiliation | Department of Electric Engineering and Electronics, Faculty of Engineering, Seikei University |
Date | 2000/5/12 |
Paper # | ED2000-37, CPM2000-22, SDM2000-37 |
Volume (vol) | vol.100 |
Number (no) | 60 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |