Presentation | 2000/5/12 Growth of CuGaS_2 with buried SiO_2 structure by Epitaxial lateral overgrowth Akimitsu Ikeda, masanori Hibi, Hideto Miyake, Kazumasa Hiramatsu, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Selective area growth(SAG)of CuGaS_2 using SiO_2 mask by open-tube iodine transport method was studied for reducing dislocation density and improving crystalline quality. Selectivity of SAG using a dot patte depended on iodine concentration. The grown crystal had{112}and{011}facets which are observed in CVT-grown CuGaS_2. Optimizing conditioms of iodine concentration and mask pattern direction, buried SiO_2 structure was obtained by epitaxial lateral overgrowth(ELO)using a stripe pattern. FWHM of x-ray rocking curve was nearly same as that of a CVT grown substrate. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Open-tube iodine transport method / CuGaS_2 / Selective area growth / Epitaxial lateral over growth |
Paper # | ED2000-32, CPM2000-17, SDM2000-32 |
Date of Issue |
Conference Information | |
Committee | CPM |
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Conference Date | 2000/5/12(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
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Paper Information | |
Registration To | Component Parts and Materials (CPM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Growth of CuGaS_2 with buried SiO_2 structure by Epitaxial lateral overgrowth |
Sub Title (in English) | |
Keyword(1) | Open-tube iodine transport method |
Keyword(2) | CuGaS_2 |
Keyword(3) | Selective area growth |
Keyword(4) | Epitaxial lateral over growth |
1st Author's Name | Akimitsu Ikeda |
1st Author's Affiliation | Department of Electrical and Electronic Engineering, Mie University() |
2nd Author's Name | masanori Hibi |
2nd Author's Affiliation | Department of Electrical and Electronic Engineering, Mie University |
3rd Author's Name | Hideto Miyake |
3rd Author's Affiliation | Department of Electrical and Electronic Engineering, Mie University |
4th Author's Name | Kazumasa Hiramatsu |
4th Author's Affiliation | Department of Electrical and Electronic Engineering, Mie University |
Date | 2000/5/12 |
Paper # | ED2000-32, CPM2000-17, SDM2000-32 |
Volume (vol) | vol.100 |
Number (no) | 60 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |