| Presentation | 2000/6/16 Development of a microsensor for the measurement of indoor environmental pollutions Tatsuya Yokoyama, Kazuhiro Hara, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We have fabricated a microsensor for the measurement of indoor environmental pollutions. It is fabricated on a diaphragm on an Si substrate by using thin film technology, IC fabrication process, and micro-machining technique. The sensing layer has a double layer structure; the first layer is a thin-film composed of Fe_2O_3-based material and the second layer is a thin film composed of SnO_2-based material. A microheater is also fabricated on a diaphragm on a Si substrate in the same way, being placed near the microsensor in a parallel position. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Environmental measurement / Indoor environmental pollutions / microsensor / oxide semiconductor sensor |
| Paper # | CPM2000-33 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
|---|---|
| Conference Date | 2000/6/16(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of a microsensor for the measurement of indoor environmental pollutions |
| Sub Title (in English) | |
| Keyword(1) | Environmental measurement |
| Keyword(2) | Indoor environmental pollutions |
| Keyword(3) | microsensor |
| Keyword(4) | oxide semiconductor sensor |
| 1st Author's Name | Tatsuya Yokoyama |
| 1st Author's Affiliation | College of Engineering, Tokyo Denki University() |
| 2nd Author's Name | Kazuhiro Hara |
| 2nd Author's Affiliation | College of Engineering, Tokyo Denki University |
| Date | 2000/6/16 |
| Paper # | CPM2000-33 |
| Volume (vol) | vol.100 |
| Number (no) | 141 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |