Presentation | 2000/6/16 Development of a microsensor for the measurement of indoor environmental pollutions Tatsuya Yokoyama, Kazuhiro Hara, |
---|---|
PDF Download Page | PDF download Page Link |
Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We have fabricated a microsensor for the measurement of indoor environmental pollutions. It is fabricated on a diaphragm on an Si substrate by using thin film technology, IC fabrication process, and micro-machining technique. The sensing layer has a double layer structure; the first layer is a thin-film composed of Fe_2O_3-based material and the second layer is a thin film composed of SnO_2-based material. A microheater is also fabricated on a diaphragm on a Si substrate in the same way, being placed near the microsensor in a parallel position. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Environmental measurement / Indoor environmental pollutions / microsensor / oxide semiconductor sensor |
Paper # | CPM2000-33 |
Date of Issue |
Conference Information | |
Committee | CPM |
---|---|
Conference Date | 2000/6/16(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | |
Vice Chair | |
Secretary | |
Assistant |
Paper Information | |
Registration To | Component Parts and Materials (CPM) |
---|---|
Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Development of a microsensor for the measurement of indoor environmental pollutions |
Sub Title (in English) | |
Keyword(1) | Environmental measurement |
Keyword(2) | Indoor environmental pollutions |
Keyword(3) | microsensor |
Keyword(4) | oxide semiconductor sensor |
1st Author's Name | Tatsuya Yokoyama |
1st Author's Affiliation | College of Engineering, Tokyo Denki University() |
2nd Author's Name | Kazuhiro Hara |
2nd Author's Affiliation | College of Engineering, Tokyo Denki University |
Date | 2000/6/16 |
Paper # | CPM2000-33 |
Volume (vol) | vol.100 |
Number (no) | 141 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |