Presentation 2000/6/16
Development of a microsensor for the measurement of indoor environmental pollutions
Tatsuya Yokoyama, Kazuhiro Hara,
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Abstract(in English) We have fabricated a microsensor for the measurement of indoor environmental pollutions. It is fabricated on a diaphragm on an Si substrate by using thin film technology, IC fabrication process, and micro-machining technique. The sensing layer has a double layer structure; the first layer is a thin-film composed of Fe_2O_3-based material and the second layer is a thin film composed of SnO_2-based material. A microheater is also fabricated on a diaphragm on a Si substrate in the same way, being placed near the microsensor in a parallel position.
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Keyword(in English) Environmental measurement / Indoor environmental pollutions / microsensor / oxide semiconductor sensor
Paper # CPM2000-33
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Committee CPM
Conference Date 2000/6/16(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Development of a microsensor for the measurement of indoor environmental pollutions
Sub Title (in English)
Keyword(1) Environmental measurement
Keyword(2) Indoor environmental pollutions
Keyword(3) microsensor
Keyword(4) oxide semiconductor sensor
1st Author's Name Tatsuya Yokoyama
1st Author's Affiliation College of Engineering, Tokyo Denki University()
2nd Author's Name Kazuhiro Hara
2nd Author's Affiliation College of Engineering, Tokyo Denki University
Date 2000/6/16
Paper # CPM2000-33
Volume (vol) vol.100
Number (no) 141
Page pp.pp.-
#Pages 6
Date of Issue