| Presentation | 2000/6/16 CPM2000-31 Thin gate SiC Schottky diode: Study on yield and Characterization for Sensor application Shabbir A. Khan, Vasconcelos Elder A. de, W.Y. Zhang, H. Uchida, Teruaki Katsube, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | In this report deals with successful operation of Schottky diode fabricated in non-epitaxial SiC and epitaxial SiC. A Schottky diode with a thin gate formed by 80%Pt20%Pd alloy showed some sensitivity to 200 ppm of NO gas at high temperature. This response needs further investigation. Yield study shows that SiC has the promising quality for fabrication Schottky diode. Back contact resistance for Ni and anneal at 850℃ in vacuum was reliably low. Use of the epitaxial SiC gives reasonably low series resistance. High temperature characterization shows epitaxial SiC has better performance. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Thin gate / Gas sensor / Schottky diode / Yield study / Parameter / Epitaxial wafer |
| Paper # | CPM2000-31 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 2000/6/16(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | ENG |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | CPM2000-31 Thin gate SiC Schottky diode: Study on yield and Characterization for Sensor application |
| Sub Title (in English) | |
| Keyword(1) | Thin gate |
| Keyword(2) | Gas sensor |
| Keyword(3) | Schottky diode |
| Keyword(4) | Yield study |
| Keyword(5) | Parameter |
| Keyword(6) | Epitaxial wafer |
| 1st Author's Name | Shabbir A. Khan |
| 1st Author's Affiliation | Dept. of Information and Computer Sciences, Saitama University() |
| 2nd Author's Name | Vasconcelos Elder A. de |
| 2nd Author's Affiliation | Dapartmento de Fisica, Universidae Federal de pernambuco |
| 3rd Author's Name | W.Y. Zhang |
| 3rd Author's Affiliation | Dept. of Information and Computer Sciences, Saitama University |
| 4th Author's Name | H. Uchida |
| 4th Author's Affiliation | Dept. of Information and Computer Sciences, Saitama University |
| 5th Author's Name | Teruaki Katsube |
| 5th Author's Affiliation | Dept. of Information and Computer Sciences, Saitama University |
| Date | 2000/6/16 |
| Paper # | CPM2000-31 |
| Volume (vol) | vol.100 |
| Number (no) | 141 |
| Page | pp.pp.- |
| #Pages | 4 |
| Date of Issue | |