| Presentation | 1999/8/6 Electrical resistivity of Cu films deposited at a high pressure in the range of 1 Torr using gas-flow-sputtering Kiyoshi ISHII, Yutaka NISHISAKA, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Gas-flow-sputtering allows a high-rate sputter-deposition of films even at a high pressure in the range of 1 Torr. The discharge characteristics and deposition rate were investigated for the deposition of Cu films. The deposition rate was 250 A/min at 0.4 Torr. The electrical resistivity of the films depended on the sputtering pressure and the bias voltage of substrate. When the pressure was 1 Torr and the substrate bias was -60V, the resistivity was about three times of the value of bulk. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | sputtering method / sputtered film / gas-flow-sputtering / Cu film |
| Paper # | CPM99-54 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 1999/8/6(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Electrical resistivity of Cu films deposited at a high pressure in the range of 1 Torr using gas-flow-sputtering |
| Sub Title (in English) | |
| Keyword(1) | sputtering method |
| Keyword(2) | sputtered film |
| Keyword(3) | gas-flow-sputtering |
| Keyword(4) | Cu film |
| 1st Author's Name | Kiyoshi ISHII |
| 1st Author's Affiliation | Faculty of Engineering, Utsunomiya University() |
| 2nd Author's Name | Yutaka NISHISAKA |
| 2nd Author's Affiliation | Faculty of Engineering, Utsunomiya University |
| Date | 1999/8/6 |
| Paper # | CPM99-54 |
| Volume (vol) | vol.99 |
| Number (no) | 257 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |