Presentation | 1999/8/6 Preparations of Thin-film PTC Devices Based on a Ba-Ti System by YAG Laser lrradiation Yuichi Sato, Toshiaki Kawamura, Susumu Sato, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | A YAG laser irradiation technique is investigated for preparations of micro thin-film PTC devices. Micro areas in stacked layers consist of a Ti thin film and a BaO thin film are irradiated in air, and BaTiO_3 films having the PTC characteristic are successfully formed. Resistances of the irradiated areas are controlled by adjusting the irradiation power and/or scan speed. Rising temperatures of the resistances are also possible to be controlled as the same with the case in sintered bulk BaTiO_3 by substituting Zr for a part of Ti. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | YAGlaser / PTC / Thin film / Oxidation / BaTiO_3 |
Paper # | CPM99-53 |
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Conference Information | |
Committee | CPM |
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Conference Date | 1999/8/6(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Component Parts and Materials (CPM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Preparations of Thin-film PTC Devices Based on a Ba-Ti System by YAG Laser lrradiation |
Sub Title (in English) | |
Keyword(1) | YAGlaser |
Keyword(2) | PTC |
Keyword(3) | Thin film |
Keyword(4) | Oxidation |
Keyword(5) | BaTiO_3 |
1st Author's Name | Yuichi Sato |
1st Author's Affiliation | Department of Electrical and Electronic Engineering, Faculty of Engineering and Resource Science, Akita University() |
2nd Author's Name | Toshiaki Kawamura |
2nd Author's Affiliation | Department of Electrical and Electronic Engineering, Faculty of Engineering and Resource Science, Akita University |
3rd Author's Name | Susumu Sato |
3rd Author's Affiliation | Department of Electrical and Electronic Engineering, Faculty of Engineering and Resource Science, Akita University / |
Date | 1999/8/6 |
Paper # | CPM99-53 |
Volume (vol) | vol.99 |
Number (no) | 257 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |