Presentation 1999/8/6
Preparations of Thin-film PTC Devices Based on a Ba-Ti System by YAG Laser lrradiation
Yuichi Sato, Toshiaki Kawamura, Susumu Sato,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) A YAG laser irradiation technique is investigated for preparations of micro thin-film PTC devices. Micro areas in stacked layers consist of a Ti thin film and a BaO thin film are irradiated in air, and BaTiO_3 films having the PTC characteristic are successfully formed. Resistances of the irradiated areas are controlled by adjusting the irradiation power and/or scan speed. Rising temperatures of the resistances are also possible to be controlled as the same with the case in sintered bulk BaTiO_3 by substituting Zr for a part of Ti.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) YAGlaser / PTC / Thin film / Oxidation / BaTiO_3
Paper # CPM99-53
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Committee CPM
Conference Date 1999/8/6(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Preparations of Thin-film PTC Devices Based on a Ba-Ti System by YAG Laser lrradiation
Sub Title (in English)
Keyword(1) YAGlaser
Keyword(2) PTC
Keyword(3) Thin film
Keyword(4) Oxidation
Keyword(5) BaTiO_3
1st Author's Name Yuichi Sato
1st Author's Affiliation Department of Electrical and Electronic Engineering, Faculty of Engineering and Resource Science, Akita University()
2nd Author's Name Toshiaki Kawamura
2nd Author's Affiliation Department of Electrical and Electronic Engineering, Faculty of Engineering and Resource Science, Akita University
3rd Author's Name Susumu Sato
3rd Author's Affiliation Department of Electrical and Electronic Engineering, Faculty of Engineering and Resource Science, Akita University /
Date 1999/8/6
Paper # CPM99-53
Volume (vol) vol.99
Number (no) 257
Page pp.pp.-
#Pages 6
Date of Issue