Presentation 1999/7/9
Process Conditions of X-axis Inversion Using Laser Beam Irradiation for a Quartz Plate
Satoru NOGE, Takehiko UNO,
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Abstract(in English) We have previously reported an x-axis inversion (twinning) technique by laser beam irradiation for a rotated Y-cut quartz plate. This paper presents the relation between the twinning pattern and the scanning conditions of a laser beam. It was clarified that the twinning pattern depends on the irradiation conditions that are the laser power and the scanning number of times. To obtain the twitming pattern corresponding well with the metal film, it is necessary to investigate the optimum scanning times under a condition of laser power.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) laser / quartz / twinning / x-axis inversion
Paper # CPM99-46
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Committee CPM
Conference Date 1999/7/9(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Process Conditions of X-axis Inversion Using Laser Beam Irradiation for a Quartz Plate
Sub Title (in English)
Keyword(1) laser
Keyword(2) quartz
Keyword(3) twinning
Keyword(4) x-axis inversion
1st Author's Name Satoru NOGE
1st Author's Affiliation Dept. Electric and Electrical Eng. Kanagawa Institute of Technology()
2nd Author's Name Takehiko UNO
2nd Author's Affiliation Dept. Electric and Electrical Eng. Kanagawa Institute of Technology
Date 1999/7/9
Paper # CPM99-46
Volume (vol) vol.99
Number (no) 169
Page pp.pp.-
#Pages 6
Date of Issue