Presentation 1999/5/20
「Invited Paper」 High Frequency Wide-Bandgap Semiconductor Devices
H. Masato, Y. Ikeda, T. Matsuno, K. Nishii, K. Inoue, D. Ueda,
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Abstract(in English) We have fabricated 0.3μm-gate FETs by using AlGaN/GaN hetero-structure grown on semi-insulating SiC Substrate. The device showed the maximum drain current of 740mA/mm, the peak transconductance of 150mS/mm and the high breakdown voltage of over 50V. Frequency dispersion was not observed at all. The cut-off frequency f_T of 22.2GHz and the maximum oscillation frequency fmax of 85.3GHz and the output power of 1W/mm at 1.9GHz were obtained for 100μm-gatewidth FET. These results indicate that, AlGaN/GaN HFET grown on SiC substrate is quite suitable for microwave or millimeter wave band power applications.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) AlGaN/GaN HFET / SiC Substrate / Power FET / Frequency Dispersion / Microwave
Paper # CPM99-10
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Committee CPM
Conference Date 1999/5/20(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) 「Invited Paper」 High Frequency Wide-Bandgap Semiconductor Devices
Sub Title (in English)
Keyword(1) AlGaN/GaN HFET
Keyword(2) SiC Substrate
Keyword(3) Power FET
Keyword(4) Frequency Dispersion
Keyword(5) Microwave
1st Author's Name H. Masato
1st Author's Affiliation Compound Semiconductor Research Department Semiconductor Device Research Center, Semiconductor Company Matsushita Electronics Corporation()
2nd Author's Name Y. Ikeda
2nd Author's Affiliation Compound Semiconductor Research Department Semiconductor Device Research Center, Semiconductor Company Matsushita Electronics Corporation
3rd Author's Name T. Matsuno
3rd Author's Affiliation Compound Semiconductor Research Department Semiconductor Device Research Center, Semiconductor Company Matsushita Electronics Corporation
4th Author's Name K. Nishii
4th Author's Affiliation Compound Semiconductor Research Department Semiconductor Device Research Center, Semiconductor Company Matsushita Electronics Corporation
5th Author's Name K. Inoue
5th Author's Affiliation Compound Semiconductor Research Department Semiconductor Device Research Center, Semiconductor Company Matsushita Electronics Corporation
6th Author's Name D. Ueda
6th Author's Affiliation Compound Semiconductor Research Department Semiconductor Device Research Center, Semiconductor Company Matsushita Electronics Corporation
Date 1999/5/20
Paper # CPM99-10
Volume (vol) vol.99
Number (no) 65
Page pp.pp.-
#Pages 6
Date of Issue