Presentation 1999/5/20
Thin-film SOI Power MOSFETs
Satoshi Matsumoto, Yasushi Hiraoka, Toshiaki Yachi,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) A thin-film SOI power MOSFET has been attractive for high-frequency applications because its parasitic capacitance is much lower than that fabricated on the conventional bulk Si substrate. This paper describes the device characteristics of the thin-film SOI power MOSFET for high-frequency switching and radio frequency applications. This.paper also describe the problems of the thin-film SOI power MOSFET and countermeasures for their problems.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) SOI / Quasi-SOI / Switching devices / Radio frequency power MOSFET
Paper # CPM99-6
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Conference Information
Committee CPM
Conference Date 1999/5/20(1days)
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Paper Information
Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Thin-film SOI Power MOSFETs
Sub Title (in English)
Keyword(1) SOI
Keyword(2) Quasi-SOI
Keyword(3) Switching devices
Keyword(4) Radio frequency power MOSFET
1st Author's Name Satoshi Matsumoto
1st Author's Affiliation NTT Telecommunications Energy Laboratories()
2nd Author's Name Yasushi Hiraoka
2nd Author's Affiliation NTT Telecommunications Energy Laboratories
3rd Author's Name Toshiaki Yachi
3rd Author's Affiliation NTT Telecommunications Energy Laboratories
Date 1999/5/20
Paper # CPM99-6
Volume (vol) vol.99
Number (no) 65
Page pp.pp.-
#Pages 8
Date of Issue