| Presentation | 1999/5/20 Identification of MOS Oxide Defect Location With A Spatial Resolution Less Than 0.1μm Using Photoemission Microscope Takashi Ohzone, Masae Yuzaki, Toshihiro Matsuda, Etsumasa Kameda, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The maximum photoemission position corresponding to the oxide defect was determined in a spatial resolution less than 0.1μm by a combination of an improved photoemission microscope with a magnification of 500x and a test structure of MOS capacitors which had a periodic X-Y matrix pattern to define the precise oxide-defect location. The field-oxide islands, which had photoemission spots from the oxide defects, distributed at random. The LOCOS edge corresponding to the intensity dent of the reflected light image was located at about +0.3μm from the gate-oxide edge. The oxide-defects were located in +0.4~-0.1μm from the LOCOS edge. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | MOS capacitor / MOSFET LOCOS isolation / oxide defect / oxide reliability photoemission microscope |
| Paper # | CPM99-5 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 1999/5/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Identification of MOS Oxide Defect Location With A Spatial Resolution Less Than 0.1μm Using Photoemission Microscope |
| Sub Title (in English) | |
| Keyword(1) | MOS capacitor |
| Keyword(2) | MOSFET LOCOS isolation |
| Keyword(3) | oxide defect |
| Keyword(4) | oxide reliability photoemission microscope |
| 1st Author's Name | Takashi Ohzone |
| 1st Author's Affiliation | Department of Electronics and Informatics, Toyama Prefectural University() |
| 2nd Author's Name | Masae Yuzaki |
| 2nd Author's Affiliation | Department of Electronics and Informatics, Toyama Prefectural University |
| 3rd Author's Name | Toshihiro Matsuda |
| 3rd Author's Affiliation | Machinery and Electronics Laboratory, Toyama Industrial Technology Center |
| 4th Author's Name | Etsumasa Kameda |
| 4th Author's Affiliation | Department of Electrical Engineering, Toyama National College of Technology |
| Date | 1999/5/20 |
| Paper # | CPM99-5 |
| Volume (vol) | vol.99 |
| Number (no) | 65 |
| Page | pp.pp.- |
| #Pages | 7 |
| Date of Issue | |