| Presentation | 1999/5/20 Application of TiO_2 film with optical catalyst to environment by Electron-Beam-Excited Plasma Takanori Kubota, Ren Suzuki, Taishi Mutuga, Shinken Koh, Toshitaro Yoshioka, Keisuke Kida, Kiyohide Baba, Akira Nishiwaki, Shunjiro Ikezawa, Yoshihiko Ninomiya, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | As the application of EBEP (Electron-Beam-Excited Plasma) apparatus, we try to make many kinds of thin films. There is remarkable characteristic in EBEP; The electron-beam eneregy and density are controlled independently by accelerating voltage V_A and discharge current I_D, respectively. The film quality can be controlled by their variations. As an instance of them, TiO_2 films are formed by means of the electron-beam method, varying the V_A(80, 90, and 100V) and I_D(3, 4, and 5A). As a result, it is found that film color and their composition are controlled by V_A and deposition rate is controlled by I_D, And, TiO_2 film deposited on the filter of air conditioner will be tried in meter size EBEP as an application. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | EBEP Apparatus / TiO_2 film / Discharge current / Accelerating voltage |
| Paper # | CPM99-2 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 1999/5/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Application of TiO_2 film with optical catalyst to environment by Electron-Beam-Excited Plasma |
| Sub Title (in English) | |
| Keyword(1) | EBEP Apparatus |
| Keyword(2) | TiO_2 film |
| Keyword(3) | Discharge current |
| Keyword(4) | Accelerating voltage |
| 1st Author's Name | Takanori Kubota |
| 1st Author's Affiliation | Collage of Engineering, Chubu University() |
| 2nd Author's Name | Ren Suzuki |
| 2nd Author's Affiliation | Collage of Engineering, Chubu University |
| 3rd Author's Name | Taishi Mutuga |
| 3rd Author's Affiliation | Collage of Engineering, Chubu University |
| 4th Author's Name | Shinken Koh |
| 4th Author's Affiliation | Collage of Engineering, Chubu University |
| 5th Author's Name | Toshitaro Yoshioka |
| 5th Author's Affiliation | Collage of Engineering, Chubu University |
| 6th Author's Name | Keisuke Kida |
| 6th Author's Affiliation | Collage of Engineering, Chubu University |
| 7th Author's Name | Kiyohide Baba |
| 7th Author's Affiliation | Collage of Engineering, Chubu University |
| 8th Author's Name | Akira Nishiwaki |
| 8th Author's Affiliation | Collage of Engineering, Chubu University |
| 9th Author's Name | Shunjiro Ikezawa |
| 9th Author's Affiliation | Collage of Engineering, Chubu University |
| 10th Author's Name | Yoshihiko Ninomiya |
| 10th Author's Affiliation | Collage of Engineering, Chubu University |
| Date | 1999/5/20 |
| Paper # | CPM99-2 |
| Volume (vol) | vol.99 |
| Number (no) | 65 |
| Page | pp.pp.- |
| #Pages | 8 |
| Date of Issue | |