| Presentation | 1999/5/20 Characteristics of Nb_2O_5 film for optical wave gide by Electron-Beam-Excited Plasma Ren Suzuki, Takanori Kubota, Taishi Mutuga, Shinken Koh, Toshitaro Yoshioka, Keisuke Kida, Kiyohide Baba, Shunjiro Ikezawa, Akira Nishiwaki, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | As application of EBEP (Electron-Beam-Excited Plasma) apparatus that has remarkable characteristics of plasma processing control, we try to make many kinds of thin films. For example, we made Nb_2O_5 in order to make a waveguide-type optical modulator. As a result, we successed to make film of the qualification: refractive index of a wavegide layer n_f> refractive index of a base n_s> refractive index of cover n_c. Therefore, it become possible to establish waveguide-type modulator of electro-optical crystal. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | EBEP Appratus / Nb_2O_5 film / Optical waveguide / Discharge current / Accelating voltage |
| Paper # | CPM99-1 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 1999/5/20(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Characteristics of Nb_2O_5 film for optical wave gide by Electron-Beam-Excited Plasma |
| Sub Title (in English) | |
| Keyword(1) | EBEP Appratus |
| Keyword(2) | Nb_2O_5 film |
| Keyword(3) | Optical waveguide |
| Keyword(4) | Discharge current |
| Keyword(5) | Accelating voltage |
| 1st Author's Name | Ren Suzuki |
| 1st Author's Affiliation | Collage of Engineering, Chubu University() |
| 2nd Author's Name | Takanori Kubota |
| 2nd Author's Affiliation | Collage of Engineering, Chubu University |
| 3rd Author's Name | Taishi Mutuga |
| 3rd Author's Affiliation | Collage of Engineering, Chubu University |
| 4th Author's Name | Shinken Koh |
| 4th Author's Affiliation | Collage of Engineering, Chubu University |
| 5th Author's Name | Toshitaro Yoshioka |
| 5th Author's Affiliation | Collage of Engineering, Chubu University |
| 6th Author's Name | Keisuke Kida |
| 6th Author's Affiliation | Collage of Engineering, Chubu University |
| 7th Author's Name | Kiyohide Baba |
| 7th Author's Affiliation | Collage of Engineering, Chubu University |
| 8th Author's Name | Shunjiro Ikezawa |
| 8th Author's Affiliation | Collage of Engineering, Chubu University |
| 9th Author's Name | Akira Nishiwaki |
| 9th Author's Affiliation | Collage of Engineering, Chubu University |
| Date | 1999/5/20 |
| Paper # | CPM99-1 |
| Volume (vol) | vol.99 |
| Number (no) | 65 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |