| Presentation | 1998/11/5 Fabrication of GaP/InAs islands/GaP(001)structures by organometallic vapor phase epitaxy S. Fuchi, Y. Nonogaki, H. Moriya, Y. Fujiwara, Y. Takeda, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We fabricated InAs islands on GaP(001)by low-pressure organometallic vapor phase epitaxy(LP-OMVPE). Using AFM, we investigated the effects of substrate temperature and TMIn flow rate on the shape, size and areal density of InAs islands. The smallest InAs islands with the highest density were obtained at 450℃ with the TMIn flow rate of 0.3 μmol/min. The size of the InAs islands is 5 nm in height and 30 nm in width. We fabricated GaP/InAs islands/GaP(001)structures using three types of growth sequences for GaP cap layers. Cross-sectional TEM observation on buried InAs islands revealed that the growth sequence for GaP cap layers affected strongly the size of InAs islands and crystal-quality of GaP cap layers. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | OMVPE / InAs islands / GaP(001) / AFM / cross-sectional TEM |
| Paper # | ED98-125,CPM98-128 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 1998/11/5(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Fabrication of GaP/InAs islands/GaP(001)structures by organometallic vapor phase epitaxy |
| Sub Title (in English) | |
| Keyword(1) | OMVPE |
| Keyword(2) | InAs islands |
| Keyword(3) | GaP(001) |
| Keyword(4) | AFM |
| Keyword(5) | cross-sectional TEM |
| 1st Author's Name | S. Fuchi |
| 1st Author's Affiliation | Department of Materials Science and Engineering, Graduate School of Engineering, Nagoya University() |
| 2nd Author's Name | Y. Nonogaki |
| 2nd Author's Affiliation | Department of Materials Science and Engineering, Graduate School of Engineering, Nagoya University |
| 3rd Author's Name | H. Moriya |
| 3rd Author's Affiliation | Department of Materials Science and Engineering, Graduate School of Engineering, Nagoya University |
| 4th Author's Name | Y. Fujiwara |
| 4th Author's Affiliation | Department of Materials Science and Engineering, Graduate School of Engineering, Nagoya University |
| 5th Author's Name | Y. Takeda |
| 5th Author's Affiliation | Department of Materials Science and Engineering, Graduate School of Engineering, Nagoya University |
| Date | 1998/11/5 |
| Paper # | ED98-125,CPM98-128 |
| Volume (vol) | vol.98 |
| Number (no) | 385 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |