| Presentation | 1998/10/29 Growth conditions of Al/HfN bilayered films with successive signle orientatin on (001) Si and (111) Si Satoko Shinkai, Katsutaka Sasaki, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | HfN films prepared on (001) Si and (111) Si under the optimum sputtering conditions using a UHV system grow in single-oriented states, respectively, and have about 27 μ Ωcm. It is expected that these HfN films are epitaxial growth films, because of the small mismatches between HfN and Si. In particular, if Al (111) plane with excellent EM resistance can be grown in a single-oriented state on HfN film, we expect that the reliability of Al metallization technology is improved. Therefore, the pole figures of HfN films deposited on Si were investigated by XRD analysis in order to confirm this. It is revealed that the HfN films are grown epitaxially with the relations of HfN (100) [110]//Si (001)[110] and HfN (111) [200]//Si (111) [200], respectively, and (111) Al film also grows in a single-oriented state on (111) HfN film. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | epitaxial growth / single-oriented growth / XRD pole figure / low resistivity / EM resistance |
| Paper # | CPM98-118 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 1998/10/29(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Growth conditions of Al/HfN bilayered films with successive signle orientatin on (001) Si and (111) Si |
| Sub Title (in English) | |
| Keyword(1) | epitaxial growth |
| Keyword(2) | single-oriented growth |
| Keyword(3) | XRD pole figure |
| Keyword(4) | low resistivity |
| Keyword(5) | EM resistance |
| 1st Author's Name | Satoko Shinkai |
| 1st Author's Affiliation | Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology() |
| 2nd Author's Name | Katsutaka Sasaki |
| 2nd Author's Affiliation | Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology |
| Date | 1998/10/29 |
| Paper # | CPM98-118 |
| Volume (vol) | vol.98 |
| Number (no) | 376 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |