Presentation 1998/9/25
Simulation of Readout Signals with Near Field SIL
Katsura Otaki,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) For analyzing the readout signal with near field SIL (Solid Immersion Lens), We have developed the simulator based on the vector diffraction theory. Simulation was executed by using the plane wave expansion method and the rigorous coupled wave method. Readout signals from the intensity modulation disks was analyzing and the relations between the flying height and the signal amplitude was discussed.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) near field / solid immersion lens / flying head / high NA imaging / vector diffraction
Paper # CPM98-110
Date of Issue

Conference Information
Committee CPM
Conference Date 1998/9/25(1days)
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Paper Information
Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Simulation of Readout Signals with Near Field SIL
Sub Title (in English)
Keyword(1) near field
Keyword(2) solid immersion lens
Keyword(3) flying head
Keyword(4) high NA imaging
Keyword(5) vector diffraction
1st Author's Name Katsura Otaki
1st Author's Affiliation Optical R&D Department, Nikon Corp.()
Date 1998/9/25
Paper # CPM98-110
Volume (vol) vol.98
Number (no) 308
Page pp.pp.-
#Pages 6
Date of Issue