| Presentation | 1994/9/12 Auger electron spectroscopy study on the thermal stability of the Al/Al_3Ta/TaN/Si Contact system Mayumi Takeyama, Atsushi Noya, Katsutaka Sasaki, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The thermal stability of the Al, Al_3Ta/TaN/Si contact system,at which a chemical equilibrium state is realized at the contact interfaces between Al and TaN,has been studied by Auger electron spectroscopy(AES)analysis.It is shown that the Al_3Ta layer between the Al overlayer and the TaN barrier effectively suppresses the possible spontaneous reaction,and the system tolerates up to the annealing temperature of 600℃.It is found that the realization of the chemical equilibrium state at the interface is also effective in the case of using the A1_3Ta intermetallic compound as well as in the previous case of W- compound and this results in the realization of one of the most stable multilayered configurations among those of the Al metallization technology. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | metal-semiconductor interface / Al metallization / Al_3Ta intermetallic compound / chemical equilibrium state / TaN barrier |
| Paper # | CPM94-62 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
|---|---|
| Conference Date | 1994/9/12(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Auger electron spectroscopy study on the thermal stability of the Al/Al_3Ta/TaN/Si Contact system |
| Sub Title (in English) | |
| Keyword(1) | metal-semiconductor interface |
| Keyword(2) | Al metallization |
| Keyword(3) | Al_3Ta intermetallic compound |
| Keyword(4) | chemical equilibrium state |
| Keyword(5) | TaN barrier |
| 1st Author's Name | Mayumi Takeyama |
| 1st Author's Affiliation | Department of Electrical and Electronic Engineering,Faculty of Engineering,Kitami Institute of Technology() |
| 2nd Author's Name | Atsushi Noya |
| 2nd Author's Affiliation | Department of Electrical and Electronic Engineering,Faculty of Engineering,Kitami Institute of Technology |
| 3rd Author's Name | Katsutaka Sasaki |
| 3rd Author's Affiliation | Department of Material Science,Faculty of Engineering,Kitami Institute of Technology |
| Date | 1994/9/12 |
| Paper # | CPM94-62 |
| Volume (vol) | vol.94 |
| Number (no) | 226 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |