| Presentation | 1994/9/12 Preparation of polycrystalline SiC thin films and their piezo- resistive properties Ryoichi Okada, Sou Yonekubo, Kiichi Kamimura, Masato Nakao, Yoshiharu Onuma, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Silicon carbide thin films were prepared by reactive magnetron sputtering in mixture gases of Ar and CH_4.The target was made from a single crystal Si wafer.The deposition rate was from 100 to 400£nm, min!.Films were characterized by X-ray diffraction.The hig h preferred orientation was observed in the data of the sample prepared at Ar partial pressure of 60£mTorr!,CH_4 partial pressure of 40£mTorr!and substrate temperature of 750£℃!.The carrier con centration,the Hall mobility and the resistivity was 10^18>£cm^- 3>!,10^1£cm^2/Vs!and from 10^-1> to 10^-2>£Ωcm!,respectively.T he gauge factor was about 15. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Thin film / Polycrystalline / SiC / Reactive sputtering / piezo-resistive effect |
| Paper # | CPM94-61 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 1994/9/12(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Preparation of polycrystalline SiC thin films and their piezo- resistive properties |
| Sub Title (in English) | |
| Keyword(1) | Thin film |
| Keyword(2) | Polycrystalline |
| Keyword(3) | SiC |
| Keyword(4) | Reactive sputtering |
| Keyword(5) | piezo-resistive effect |
| 1st Author's Name | Ryoichi Okada |
| 1st Author's Affiliation | Faculty of Engineering,Shinshu University() |
| 2nd Author's Name | Sou Yonekubo |
| 2nd Author's Affiliation | Faculty of Engineering,Shinshu University |
| 3rd Author's Name | Kiichi Kamimura |
| 3rd Author's Affiliation | Faculty of Engineering,Shinshu University |
| 4th Author's Name | Masato Nakao |
| 4th Author's Affiliation | Faculty of Engineering,Shinshu University |
| 5th Author's Name | Yoshiharu Onuma |
| 5th Author's Affiliation | Faculty of Engineering,Shinshu University |
| Date | 1994/9/12 |
| Paper # | CPM94-61 |
| Volume (vol) | vol.94 |
| Number (no) | 226 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |