| Presentation | 1994/9/12 Properties of InN thin films prepared by using an ECR plasma source Yuichi Sato, Susumu Sato, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | InN thin films are prepared by reactive evaporation using an ECR plasma source.Properties of their films are measured and compared with those of InN films prepared by reactive evaporation using RF plasma.Substrate temperatures at which InN films having fine crystallinity are obtained are more or less higher than those of films prepared by RF plasma.However,surface morphologies of their films are relatively smooth.Deteriorations of surface morphologies and crystallinities of films prepared by ECR plasma are not observed even when their deposition rates are extremely low. Dependences of the film properties on the distance between the plasma source and substrates,and the diameter of orifices of the plasma source are also investigated. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | InN / ECR plasma / RF plasma / reactive evaporation / thin film |
| Paper # | CPM94-59 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 1994/9/12(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Properties of InN thin films prepared by using an ECR plasma source |
| Sub Title (in English) | |
| Keyword(1) | InN |
| Keyword(2) | ECR plasma |
| Keyword(3) | RF plasma |
| Keyword(4) | reactive evaporation |
| Keyword(5) | thin film |
| 1st Author's Name | Yuichi Sato |
| 1st Author's Affiliation | Department of Electrical and Electronic Engineering,Mining College, Akita University() |
| 2nd Author's Name | Susumu Sato |
| 2nd Author's Affiliation | Department of Electrical and Electronic Engineering,Mining College, Akita University |
| Date | 1994/9/12 |
| Paper # | CPM94-59 |
| Volume (vol) | vol.94 |
| Number (no) | 226 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |