| Presentation | 1994/9/12 Preparation of boron films deposited by plasma CVD with boron chloride Ichiro Ohtake, Takahiro Satoh, Miyako Ohkubo, Masato Nakao, Kiichi Kamimura, Yoshiharu Onuma, |
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| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Polycrystalline boron films were deposited by plasma assisted chemical vapor deposition.The source gas was boron chloride diluted with hydrogen.The structure of film was characterized by transmission electron beam diffraction.The ring pattern shows the films are polycrystalline α-boron.Absorption edge was about 1.4eV, and was independent on deposition temperature.The carrier density was of the order of 10^16>～10^18>cm^-3>.The Hall mobility was s everal cm^2, Vsec. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | α-rhombo hedral / boron film / plasma CVD / transmission electr on beem diffraction |
| Paper # | CPM94-58 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 1994/9/12(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Preparation of boron films deposited by plasma CVD with boron chloride |
| Sub Title (in English) | |
| Keyword(1) | α-rhombo hedral |
| Keyword(2) | boron film |
| Keyword(3) | plasma CVD |
| Keyword(4) | transmission electr on beem diffraction |
| 1st Author's Name | Ichiro Ohtake |
| 1st Author's Affiliation | Faculty of Engineering,Shinshu University() |
| 2nd Author's Name | Takahiro Satoh |
| 2nd Author's Affiliation | Faculty of Engineering,Shinshu University |
| 3rd Author's Name | Miyako Ohkubo |
| 3rd Author's Affiliation | Faculty of Engineering,Shinshu University |
| 4th Author's Name | Masato Nakao |
| 4th Author's Affiliation | Faculty of Engineering,Shinshu University |
| 5th Author's Name | Kiichi Kamimura |
| 5th Author's Affiliation | Faculty of Engineering,Shinshu University |
| 6th Author's Name | Yoshiharu Onuma |
| 6th Author's Affiliation | Faculty of Engineering,Shinshu University |
| Date | 1994/9/12 |
| Paper # | CPM94-58 |
| Volume (vol) | vol.94 |
| Number (no) | 226 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |