| Presentation | 1994/9/12 Preparation of CuInS_2 films by the reactive sputtering Yasuyuki Kobayashi, Dan Yang Yu, Sarinanto M.M., Satoshi Kobayashi, Futao Kaneko, Takahiro Kawakami, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | CuInS_2 thin films have been deposited on the glass substrates at 150 and 350℃ by the reactive sputtering method using CS_2 as re active gass.Nearly stoichiometric CuInS_2 films are obtained at about 0.02Pa of CS_2 partial pressure.The band gap is slightly lower than that of the single crystal.The resistivity tends to decrease with increasin atomic ratio Cu, In. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | sputtering / CuInS_2 / resistivity / X-rey diffraction / EPMA / transmission |
| Paper # | CPM94-56 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 1994/9/12(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Preparation of CuInS_2 films by the reactive sputtering |
| Sub Title (in English) | |
| Keyword(1) | sputtering |
| Keyword(2) | CuInS_2 |
| Keyword(3) | resistivity |
| Keyword(4) | X-rey diffraction |
| Keyword(5) | EPMA |
| Keyword(6) | transmission |
| 1st Author's Name | Yasuyuki Kobayashi |
| 1st Author's Affiliation | Faculty of Engineering,Niigata University() |
| 2nd Author's Name | Dan Yang Yu |
| 2nd Author's Affiliation | Faculty of Engineering,Niigata University |
| 3rd Author's Name | Sarinanto M.M. |
| 3rd Author's Affiliation | Tokyo Institute of Technology |
| 4th Author's Name | Satoshi Kobayashi |
| 4th Author's Affiliation | Faculty of Engineering,Niigata University |
| 5th Author's Name | Futao Kaneko |
| 5th Author's Affiliation | Faculty of Engineering,Niigata University |
| 6th Author's Name | Takahiro Kawakami |
| 6th Author's Affiliation | Faculty of Engineering,Niigata University |
| Date | 1994/9/12 |
| Paper # | CPM94-56 |
| Volume (vol) | vol.94 |
| Number (no) | 226 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |