| Presentation | 1993/10/18 Planarization Process of Copper-Polyimide Mulutilayered Substrates Yukio Kasuya, Yoshiro Takahashi, Yasuo Iguchi, Takashi Kanamori, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | We reviewed a planarization proces using a etchback method in a via-post conection type copper-polyimide thin film multilayered substrate.We carried out fundamental studie of the degree of planarization of a polyimide and a photoresist Which is used as a sacrifical layer,the etching rates of polyimide and photoresist, and the pull strength between planarized polyimide and copper using wiring conductor.Then,we used a planarrization process based on the etchback method to fabricate a thin film multilayered substrate,made an evalution of a reliability(the rate of change in connection resistance,the insulation resistance)and measured the high -frequency characteristics(the characteristic impedance,the transmission loss). |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | polyimide / etchback method / D.O.P / sacrifrcal layer |
| Paper # | CPM93-79 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 1993/10/18(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Planarization Process of Copper-Polyimide Mulutilayered Substrates |
| Sub Title (in English) | |
| Keyword(1) | polyimide |
| Keyword(2) | etchback method |
| Keyword(3) | D.O.P |
| Keyword(4) | sacrifrcal layer |
| 1st Author's Name | Yukio Kasuya |
| 1st Author's Affiliation | OKI Electric Industry() |
| 2nd Author's Name | Yoshiro Takahashi |
| 2nd Author's Affiliation | OKI Electric Industry |
| 3rd Author's Name | Yasuo Iguchi |
| 3rd Author's Affiliation | OKI Electric Industry |
| 4th Author's Name | Takashi Kanamori |
| 4th Author's Affiliation | OKI Electric Industry |
| Date | 1993/10/18 |
| Paper # | CPM93-79 |
| Volume (vol) | vol.93 |
| Number (no) | 275 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |