Presentation 1993/10/18
Fabrication of fine pitch solder bumps by electroplating
Soichi Honma, Hiroshi Yamada, Takeshi Miyagi, Masayuki Saito,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) Fine pitch solder bumps have been developed by electroplating. Electroplating can realize the formation of fine pitch and high aspect ratio bumps.Solder composition and the interconnection reliability have great importance on a flip chip assemble technique.In this paper,the way of controlling tin-lead solder composition is researched using an electrochemical analysis.The tin composition was controlled within plus minus five percent difference and the interconnection reliability was improved using a thick copper pad on a silicon substrate.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Electroplating / Solder / Bump / Composition / Reliability / Electrochemical
Paper # CPM93-76
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Conference Information
Committee CPM
Conference Date 1993/10/18(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Fabrication of fine pitch solder bumps by electroplating
Sub Title (in English)
Keyword(1) Electroplating
Keyword(2) Solder
Keyword(3) Bump
Keyword(4) Composition
Keyword(5) Reliability
Keyword(6) Electrochemical
1st Author's Name Soichi Honma
1st Author's Affiliation Research and Development Center,Toshiba Corporation()
2nd Author's Name Hiroshi Yamada
2nd Author's Affiliation Research and Development Center,Toshiba Corporation
3rd Author's Name Takeshi Miyagi
3rd Author's Affiliation Research and Development Center,Toshiba Corporation
4th Author's Name Masayuki Saito
4th Author's Affiliation Research and Development Center,Toshiba Corporation
Date 1993/10/18
Paper # CPM93-76
Volume (vol) vol.93
Number (no) 275
Page pp.pp.-
#Pages 6
Date of Issue