Presentation 1993/9/17
Sputtering Synthesis of Multilayered Thin Film Including CuO Layer
Kouichirou Dan, Satoru Yamagishi, Hirotomo Masuma, Yoshinori Morikawa, Hiroshi Yamamoto,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) The single phase of CuO,PbO and Cu_3N film were prepared on MgO(100)substrate by a reactive sputtering.The(100)plane of triclinic CuO was oriented in the multilayered CuO, PbO film by an altemative dc sputtering method at 350℃.The single phase of Cu_3N film was synthesized at the limited sputtering condition.The temperature dependence of electric conductivity was investigated on the multilayered CuO/PbO and CuO/Cu_3N film.The phase transition of CuO/PbO film took place at about 195K.The acfivation energy of CuO/Cu_3N film was gently changed in the vicinity of 200K.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) CuO thin film / Cu_3N thin film / multilayered thin film / conductivity / activated energy / sputtering
Paper # CPM93-73
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Conference Information
Committee CPM
Conference Date 1993/9/17(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Sputtering Synthesis of Multilayered Thin Film Including CuO Layer
Sub Title (in English)
Keyword(1) CuO thin film
Keyword(2) Cu_3N thin film
Keyword(3) multilayered thin film
Keyword(4) conductivity
Keyword(5) activated energy
Keyword(6) sputtering
1st Author's Name Kouichirou Dan
1st Author's Affiliation College of Science & Technology Faculty of Science and Engineering, Nihon University()
2nd Author's Name Satoru Yamagishi
2nd Author's Affiliation College of Science & Technology Faculty of Science and Engineering, Nihon University
3rd Author's Name Hirotomo Masuma
3rd Author's Affiliation College of Science & Technology Faculty of Science and Engineering, Nihon University
4th Author's Name Yoshinori Morikawa
4th Author's Affiliation College of Science & Technology Faculty of Science and Engineering, Nihon University
5th Author's Name Hiroshi Yamamoto
5th Author's Affiliation College of Science & Technology Faculty of Science and Engineering, Nihon University
Date 1993/9/17
Paper # CPM93-73
Volume (vol) vol.93
Number (no) 223
Page pp.pp.-
#Pages 6
Date of Issue