Presentation | 1993/9/17 Sputtering Synthesis of Multilayered Thin Film Including CuO Layer Kouichirou Dan, Satoru Yamagishi, Hirotomo Masuma, Yoshinori Morikawa, Hiroshi Yamamoto, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | The single phase of CuO,PbO and Cu_3N film were prepared on MgO(100)substrate by a reactive sputtering.The(100)plane of triclinic CuO was oriented in the multilayered CuO, PbO film by an altemative dc sputtering method at 350℃.The single phase of Cu_3N film was synthesized at the limited sputtering condition.The temperature dependence of electric conductivity was investigated on the multilayered CuO/PbO and CuO/Cu_3N film.The phase transition of CuO/PbO film took place at about 195K.The acfivation energy of CuO/Cu_3N film was gently changed in the vicinity of 200K. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | CuO thin film / Cu_3N thin film / multilayered thin film / conductivity / activated energy / sputtering |
Paper # | CPM93-73 |
Date of Issue |
Conference Information | |
Committee | CPM |
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Conference Date | 1993/9/17(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | |
Vice Chair | |
Secretary | |
Assistant |
Paper Information | |
Registration To | Component Parts and Materials (CPM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Sputtering Synthesis of Multilayered Thin Film Including CuO Layer |
Sub Title (in English) | |
Keyword(1) | CuO thin film |
Keyword(2) | Cu_3N thin film |
Keyword(3) | multilayered thin film |
Keyword(4) | conductivity |
Keyword(5) | activated energy |
Keyword(6) | sputtering |
1st Author's Name | Kouichirou Dan |
1st Author's Affiliation | College of Science & Technology Faculty of Science and Engineering, Nihon University() |
2nd Author's Name | Satoru Yamagishi |
2nd Author's Affiliation | College of Science & Technology Faculty of Science and Engineering, Nihon University |
3rd Author's Name | Hirotomo Masuma |
3rd Author's Affiliation | College of Science & Technology Faculty of Science and Engineering, Nihon University |
4th Author's Name | Yoshinori Morikawa |
4th Author's Affiliation | College of Science & Technology Faculty of Science and Engineering, Nihon University |
5th Author's Name | Hiroshi Yamamoto |
5th Author's Affiliation | College of Science & Technology Faculty of Science and Engineering, Nihon University |
Date | 1993/9/17 |
Paper # | CPM93-73 |
Volume (vol) | vol.93 |
Number (no) | 223 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |