| Presentation | 1993/9/17 Optical properties of TaOx thin film prepared by rf reactive sputtering Tsutomu Yamazaki, Keiichi Miyairi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Optical properties of TaOx thin film prepared by rf sputtering have been measured.Optical properties such as refractive index and attenuation constant of these films evaluated by the method proposed by Minkov manifested the significant difference between nontreated and thermally aged samples.That is,thermally aging gives the large refractive index,The absorption constant which is difined as the optical loss per one centimeter of thse films has been also measured.The absorption constant of thier films less than 800 nm is affected significantly thermal aging. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | refractive index / attenuation constant / absorption constant / annealing / oxidation |
| Paper # | CPM93-72 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 1993/9/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Optical properties of TaOx thin film prepared by rf reactive sputtering |
| Sub Title (in English) | |
| Keyword(1) | refractive index |
| Keyword(2) | attenuation constant |
| Keyword(3) | absorption constant |
| Keyword(4) | annealing |
| Keyword(5) | oxidation |
| 1st Author's Name | Tsutomu Yamazaki |
| 1st Author's Affiliation | Department of electric and electronic engineering,Faculty of Engineering,Shinshu University() |
| 2nd Author's Name | Keiichi Miyairi |
| 2nd Author's Affiliation | Department of electric and electronic engineering,Faculty of Engineering,Shinshu University |
| Date | 1993/9/17 |
| Paper # | CPM93-72 |
| Volume (vol) | vol.93 |
| Number (no) | 223 |
| Page | pp.pp.- |
| #Pages | 5 |
| Date of Issue | |