| Presentation | 1993/9/17 Step coverage simulation of molybdenum silicide sputtering films Toshinari Yamazaki, Nagayasu Ikeda, Keiro Sugimoto, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Step coverage calculation of molybdenum silicide films was carried out using a model constructed by modifying the string model often used for the calculation of aluminium film step coverage.In the model,the angular distributions of sputtered Mo and Si atoms were considered and,resultantly,the film composition around steps as well as the thickness could be calculated.It was concluded that the difference between the angular distribution of Mo atoms and that of Si atoms caused the deviation of the film composition around steps from that at flat surface. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | step coverage / molybdenum silicide / sputtering / thin film / angular distribution |
| Paper # | CPM93-70 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 1993/9/17(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Step coverage simulation of molybdenum silicide sputtering films |
| Sub Title (in English) | |
| Keyword(1) | step coverage |
| Keyword(2) | molybdenum silicide |
| Keyword(3) | sputtering |
| Keyword(4) | thin film |
| Keyword(5) | angular distribution |
| 1st Author's Name | Toshinari Yamazaki |
| 1st Author's Affiliation | Faculty of Engineering,Toyama University() |
| 2nd Author's Name | Nagayasu Ikeda |
| 2nd Author's Affiliation | Faculty of Engineering,Toyama University |
| 3rd Author's Name | Keiro Sugimoto |
| 3rd Author's Affiliation | Faculty of Education,Toyama University |
| Date | 1993/9/17 |
| Paper # | CPM93-70 |
| Volume (vol) | vol.93 |
| Number (no) | 223 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |