Presentation | 1993/9/16 Smell sensor utilizing sputtered aluminum-doped ZnO thin film Fumitaka Endo, Shirou Tsubakino, Mitsuo Ikeda, Hidehito Nanto, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | The responses of gas sensor using sputtered zinc oxide(ZnO)thin film for exposure to various gases as well as the aluminum(AI) doping effect on the responses have been investigated.It is found that AI-doped ZnO thin film gas sensor exhibits high sensitivity and excellent selectivity for amine gases such as trimethylamine(TMA)and dimethylamine(DMA)and is useful for freshness detection of sea foods.It is also found that a gas sensing system using ZnO thin film gas sensors in conjunction with neural network analysis is useful to discriminate among TMA,DMA and other gases. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | ZnO thin film / smell sensor / freshness sensor / neural network / sputtering |
Paper # | CPM93-68 |
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Conference Information | |
Committee | CPM |
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Conference Date | 1993/9/16(1days) |
Place (in Japanese) | (See Japanese page) |
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Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Component Parts and Materials (CPM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Smell sensor utilizing sputtered aluminum-doped ZnO thin film |
Sub Title (in English) | |
Keyword(1) | ZnO thin film |
Keyword(2) | smell sensor |
Keyword(3) | freshness sensor |
Keyword(4) | neural network |
Keyword(5) | sputtering |
1st Author's Name | Fumitaka Endo |
1st Author's Affiliation | Electron Device System Research Labolatory,Kanazawa Institute of Technology() |
2nd Author's Name | Shirou Tsubakino |
2nd Author's Affiliation | Electron Device System Research Labolatory,Kanazawa Institute of Technology |
3rd Author's Name | Mitsuo Ikeda |
3rd Author's Affiliation | Electron Device System Research Labolatory,Kanazawa Institute of Technology |
4th Author's Name | Hidehito Nanto |
4th Author's Affiliation | Electron Device System Research Labolatory,Kanazawa Institute of Technology |
Date | 1993/9/16 |
Paper # | CPM93-68 |
Volume (vol) | vol.93 |
Number (no) | 222 |
Page | pp.pp.- |
#Pages | 7 |
Date of Issue |