Presentation 1993/9/16
Smell sensor utilizing sputtered aluminum-doped ZnO thin film
Fumitaka Endo, Shirou Tsubakino, Mitsuo Ikeda, Hidehito Nanto,
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Abstract(in English) The responses of gas sensor using sputtered zinc oxide(ZnO)thin film for exposure to various gases as well as the aluminum(AI) doping effect on the responses have been investigated.It is found that AI-doped ZnO thin film gas sensor exhibits high sensitivity and excellent selectivity for amine gases such as trimethylamine(TMA)and dimethylamine(DMA)and is useful for freshness detection of sea foods.It is also found that a gas sensing system using ZnO thin film gas sensors in conjunction with neural network analysis is useful to discriminate among TMA,DMA and other gases.
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Keyword(in English) ZnO thin film / smell sensor / freshness sensor / neural network / sputtering
Paper # CPM93-68
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Committee CPM
Conference Date 1993/9/16(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Smell sensor utilizing sputtered aluminum-doped ZnO thin film
Sub Title (in English)
Keyword(1) ZnO thin film
Keyword(2) smell sensor
Keyword(3) freshness sensor
Keyword(4) neural network
Keyword(5) sputtering
1st Author's Name Fumitaka Endo
1st Author's Affiliation Electron Device System Research Labolatory,Kanazawa Institute of Technology()
2nd Author's Name Shirou Tsubakino
2nd Author's Affiliation Electron Device System Research Labolatory,Kanazawa Institute of Technology
3rd Author's Name Mitsuo Ikeda
3rd Author's Affiliation Electron Device System Research Labolatory,Kanazawa Institute of Technology
4th Author's Name Hidehito Nanto
4th Author's Affiliation Electron Device System Research Labolatory,Kanazawa Institute of Technology
Date 1993/9/16
Paper # CPM93-68
Volume (vol) vol.93
Number (no) 222
Page pp.pp.-
#Pages 7
Date of Issue