Presentation 1993/9/16
Growth of GaSe thin film on GaAs(001)
Takayuki Izumi, Kenichi Fujita, Toyokazu Tanbo, Hiromu Ueba, Chiei Tatuyama,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) III-VI layered semiconductor GaSe has been grown hetero- epitaxially on GaAs(001),and the crystalline of thin films and the interface between them have been studied by using surface analysis systems. The thin films were grown at room temperature(R.T.),250℃ and 400 ℃ as substrate temperature(Ts).The crystalline quality chemical bo nding states and crystal structure of the grown films were characterized by using low-energy electron-loss spectroscopy(LEELS),X-ray photoelectron spectroscopy(XPS)and X-ray deffraction(XRD).Though the crystal structure of GaSe is much defferent from that of GaAs(001),GaSe with a fairly good crystalline quality was successfully grown at 250℃ for the thickne ss over 30BR.By annealing at 400℃,the inprovements of the crystall ine quality were observed.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) GaAs(001) / GaSe / layered semiconductor / Van der Waals force / hetero-epitaxal / passivation
Paper # CPM93-66
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Conference Information
Committee CPM
Conference Date 1993/9/16(1days)
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Paper Information
Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Growth of GaSe thin film on GaAs(001)
Sub Title (in English)
Keyword(1) GaAs(001)
Keyword(2) GaSe
Keyword(3) layered semiconductor
Keyword(4) Van der Waals force
Keyword(5) hetero-epitaxal
Keyword(6) passivation
1st Author's Name Takayuki Izumi
1st Author's Affiliation Department of Electronics & Information Engineering,Faculty of Engineering,Toyama University()
2nd Author's Name Kenichi Fujita
2nd Author's Affiliation ADVANTEST CORPORATION
3rd Author's Name Toyokazu Tanbo
3rd Author's Affiliation Department of Electronics & Information Engineering,Faculty of Engineering,Toyama University
4th Author's Name Hiromu Ueba
4th Author's Affiliation Department of Electronics & Information Engineering,Faculty of Engineering,Toyama University
5th Author's Name Chiei Tatuyama
5th Author's Affiliation Department of Electronics & Information Engineering,Faculty of Engineering,Toyama University
Date 1993/9/16
Paper # CPM93-66
Volume (vol) vol.93
Number (no) 222
Page pp.pp.-
#Pages 6
Date of Issue