| Presentation | 1993/7/26 Hydrogen Sensors consisting of heterojunctions Kentaro Ito, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The Schottky barrier diode consisting of a Pd metal thin film deposited on such a semiconductor single crystal as n-type zinc oxide and silicon was able to respond to hydrogen even at room temperature.We developed a method to stabilize the sensitivity particularly in a hydrogen-sensitive Pd, Si O_x/Si diode.We also developed a hydrogen sensor which has an optical output signal, using a doublelayer structure which consists of the semitransparent Pd thin film deposited on a tungsten oxide film.A change in optical transmittance or reflectance of the structure is monitored.The sensor consisting of the tungsten oxide film containing water was able to detect hydrogen in about,ten seconds at room temperature. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Hydrogen sensor / Schottky barrier / Pd thin film / semicoductors / tungsten oxide films |
| Paper # | CPM93-35,OME93-21 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
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| Conference Date | 1993/7/26(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Hydrogen Sensors consisting of heterojunctions |
| Sub Title (in English) | |
| Keyword(1) | Hydrogen sensor |
| Keyword(2) | Schottky barrier |
| Keyword(3) | Pd thin film |
| Keyword(4) | semicoductors |
| Keyword(5) | tungsten oxide films |
| 1st Author's Name | Kentaro Ito |
| 1st Author's Affiliation | Department of Electrical and Electronic Engineering,Faculty of Engineering,Shinshu University() |
| Date | 1993/7/26 |
| Paper # | CPM93-35,OME93-21 |
| Volume (vol) | vol.93 |
| Number (no) | 170 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |