Presentation | 1995/9/30 Vapor Phase Epitaxy of CuAlS_2 Using Organic- and Inorganic-metalchlorides Jugo Mitomo, Nozomu Tsuboi, Seishi Iida, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | Successful vapor phase epitaxial growth of CuAlS_2 was achieved using the aluminum source of AlCl_3 or diethylaluminumchloride with CuCl and H_2S sources under simultaneous feeding. Layers with a single orientation toward c-axis were obtained for the case of diethylaluminumchloride, while layers with two orientations toward a- and c-axes were obtained for the case of AlCl_3. Under alternating feeding or metal sources (CuCl, AlCl_3) and H_2S, CuAlS_2 layers were obtained as well. Atomic layer epitaxy was not likely attained for these layers, because saturation behavior of growth rate was not observed for the feeding amount of AlCl_3. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | vapor phase epitaxy / CuAlS_2 / chalcopyrite compounds / X-ray diffraction / photoluminescence |
Paper # | CPM95-76 |
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Conference Information | |
Committee | CPM |
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Conference Date | 1995/9/30(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
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Paper Information | |
Registration To | Component Parts and Materials (CPM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Vapor Phase Epitaxy of CuAlS_2 Using Organic- and Inorganic-metalchlorides |
Sub Title (in English) | |
Keyword(1) | vapor phase epitaxy |
Keyword(2) | CuAlS_2 |
Keyword(3) | chalcopyrite compounds |
Keyword(4) | X-ray diffraction |
Keyword(5) | photoluminescence |
1st Author's Name | Jugo Mitomo |
1st Author's Affiliation | Department of Electrical Engineering, Nagaoka University of Technology() |
2nd Author's Name | Nozomu Tsuboi |
2nd Author's Affiliation | Department of Electrical Engineering, Nagaoka University of Technology |
3rd Author's Name | Seishi Iida |
3rd Author's Affiliation | Department of Electrical Engineering, Nagaoka University of Technology |
Date | 1995/9/30 |
Paper # | CPM95-76 |
Volume (vol) | vol.95 |
Number (no) | 284 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |