Presentation 1995/9/30
Vapor Phase Epitaxy of CuAlS_2 Using Organic- and Inorganic-metalchlorides
Jugo Mitomo, Nozomu Tsuboi, Seishi Iida,
PDF Download Page PDF download Page Link
Abstract(in Japanese) (See Japanese page)
Abstract(in English) Successful vapor phase epitaxial growth of CuAlS_2 was achieved using the aluminum source of AlCl_3 or diethylaluminumchloride with CuCl and H_2S sources under simultaneous feeding. Layers with a single orientation toward c-axis were obtained for the case of diethylaluminumchloride, while layers with two orientations toward a- and c-axes were obtained for the case of AlCl_3. Under alternating feeding or metal sources (CuCl, AlCl_3) and H_2S, CuAlS_2 layers were obtained as well. Atomic layer epitaxy was not likely attained for these layers, because saturation behavior of growth rate was not observed for the feeding amount of AlCl_3.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) vapor phase epitaxy / CuAlS_2 / chalcopyrite compounds / X-ray diffraction / photoluminescence
Paper # CPM95-76
Date of Issue

Conference Information
Committee CPM
Conference Date 1995/9/30(1days)
Place (in Japanese) (See Japanese page)
Place (in English)
Topics (in Japanese) (See Japanese page)
Topics (in English)
Chair
Vice Chair
Secretary
Assistant

Paper Information
Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Vapor Phase Epitaxy of CuAlS_2 Using Organic- and Inorganic-metalchlorides
Sub Title (in English)
Keyword(1) vapor phase epitaxy
Keyword(2) CuAlS_2
Keyword(3) chalcopyrite compounds
Keyword(4) X-ray diffraction
Keyword(5) photoluminescence
1st Author's Name Jugo Mitomo
1st Author's Affiliation Department of Electrical Engineering, Nagaoka University of Technology()
2nd Author's Name Nozomu Tsuboi
2nd Author's Affiliation Department of Electrical Engineering, Nagaoka University of Technology
3rd Author's Name Seishi Iida
3rd Author's Affiliation Department of Electrical Engineering, Nagaoka University of Technology
Date 1995/9/30
Paper # CPM95-76
Volume (vol) vol.95
Number (no) 284
Page pp.pp.-
#Pages 6
Date of Issue