| Presentation | 1995/7/7 Development of Insulated Gate Electrodes and Integrated Chemical Sensors Yoshitaka Ito, Takaaki Ishikawa, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | Conductor-insulator-semiconductor (CIS) structure can be two or three electric terminal devices in which there is a more recently surface photovoltage (SPV) chemical sensor. SPV sensor devices are made of different thicknesses of silicon layer with silicon wafers SOI (Silicon on Insulator) wafers and 0.6μm with SOS (Silicon on Sapphire) wafer. The peak values of an a.c. photocurrent using silicon and SOI wafers are obtained at the wavelength of around 1000nm. The SOS type SPV sensor illuminated by green laser having the wavelength 543.5 nm is superior to achieve a satisfactory position and sensitivity precision to to conventional SPV sensors made of si wafer, for large scale integrated chemical sensor system. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | SPV sensor / chemical sensor / LAPS / gas sensor / ion sensor / integrated chemical sensor |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 1995/7/7(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
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| Vice Chair | |
| Secretary | |
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| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Development of Insulated Gate Electrodes and Integrated Chemical Sensors |
| Sub Title (in English) | |
| Keyword(1) | SPV sensor |
| Keyword(2) | chemical sensor |
| Keyword(3) | LAPS |
| Keyword(4) | gas sensor |
| Keyword(5) | ion sensor |
| Keyword(6) | integrated chemical sensor |
| 1st Author's Name | Yoshitaka Ito |
| 1st Author's Affiliation | Research & Development Center, Shindengen Kogyo Co., LTD.() |
| 2nd Author's Name | Takaaki Ishikawa |
| 2nd Author's Affiliation | Research & Development Center, Shindengen Kogyo Co., LTD. |
| Date | 1995/7/7 |
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| Volume (vol) | vol.95 |
| Number (no) | 138 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |