Presentation 1996/8/20
Developmenit of Silica-based PLC Coupler by TEOS Low Temperature Plasma CVD
F. Matsumura, H. Matumoto, K. Nakasendou, H. Tanaka, Y. Fujii,
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Abstract(in Japanese) (See Japanese page)
Abstract(in English) We report the trial production of silica based PLC(planer Lightwave circuit) coupler for low speed subscriber transmission system, which is produced by low temperature plasma CVD method and RIE method. The WDM (Wavelength division Multiplex) circuit with MZ (Mach-Zender) type Optical waveguide was used for the structures of old type PLC couplers. This type couplers have relative low crosstalk characteristics and low wavelength bandwidth for WDM circuit. We designed newtype silica based PLC coupler with varied optical filters in optical waveguide, which is useful for WDM circuit, and tried the production of this coupler by low temperature plasma CVD method and RIE method. This trial production showed that this production process and this WDM circuit are both useful for silica-based PLC couplers.
Keyword(in Japanese) (See Japanese page)
Keyword(in English) Silica based Planer Ligthwave Circuit (PLC) Coupler / Wavelength Division Multiplex (WDM) / Optical Filter / CVD / RlE
Paper # EDM-96-36,CPM-96-59,OPE-96-58,LQE-96-60
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Conference Information
Committee CPM
Conference Date 1996/8/20(1days)
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Registration To Component Parts and Materials (CPM)
Language JPN
Title (in Japanese) (See Japanese page)
Sub Title (in Japanese) (See Japanese page)
Title (in English) Developmenit of Silica-based PLC Coupler by TEOS Low Temperature Plasma CVD
Sub Title (in English)
Keyword(1) Silica based Planer Ligthwave Circuit (PLC) Coupler
Keyword(2) Wavelength Division Multiplex (WDM)
Keyword(3) Optical Filter
Keyword(4) CVD
Keyword(5) RlE
1st Author's Name F. Matsumura
1st Author's Affiliation Central Research Laboratories TOYO Communication Equipment Co.,Ltd()
2nd Author's Name H. Matumoto
2nd Author's Affiliation Central Research Laboratories TOYO Communication Equipment Co.,Ltd
3rd Author's Name K. Nakasendou
3rd Author's Affiliation Central Research Laboratories TOYO Communication Equipment Co.,Ltd
4th Author's Name H. Tanaka
4th Author's Affiliation Central Research Laboratories TOYO Communication Equipment Co.,Ltd
5th Author's Name Y. Fujii
5th Author's Affiliation College of Science and Technology, Nihon University
Date 1996/8/20
Paper # EDM-96-36,CPM-96-59,OPE-96-58,LQE-96-60
Volume (vol) vol.96
Number (no) 218
Page pp.pp.-
#Pages 6
Date of Issue