Presentation | 1996/8/20 Developmenit of Silica-based PLC Coupler by TEOS Low Temperature Plasma CVD F. Matsumura, H. Matumoto, K. Nakasendou, H. Tanaka, Y. Fujii, |
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Abstract(in Japanese) | (See Japanese page) |
Abstract(in English) | We report the trial production of silica based PLC(planer Lightwave circuit) coupler for low speed subscriber transmission system, which is produced by low temperature plasma CVD method and RIE method. The WDM (Wavelength division Multiplex) circuit with MZ (Mach-Zender) type Optical waveguide was used for the structures of old type PLC couplers. This type couplers have relative low crosstalk characteristics and low wavelength bandwidth for WDM circuit. We designed newtype silica based PLC coupler with varied optical filters in optical waveguide, which is useful for WDM circuit, and tried the production of this coupler by low temperature plasma CVD method and RIE method. This trial production showed that this production process and this WDM circuit are both useful for silica-based PLC couplers. |
Keyword(in Japanese) | (See Japanese page) |
Keyword(in English) | Silica based Planer Ligthwave Circuit (PLC) Coupler / Wavelength Division Multiplex (WDM) / Optical Filter / CVD / RlE |
Paper # | EDM-96-36,CPM-96-59,OPE-96-58,LQE-96-60 |
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Conference Information | |
Committee | CPM |
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Conference Date | 1996/8/20(1days) |
Place (in Japanese) | (See Japanese page) |
Place (in English) | |
Topics (in Japanese) | (See Japanese page) |
Topics (in English) | |
Chair | |
Vice Chair | |
Secretary | |
Assistant |
Paper Information | |
Registration To | Component Parts and Materials (CPM) |
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Language | JPN |
Title (in Japanese) | (See Japanese page) |
Sub Title (in Japanese) | (See Japanese page) |
Title (in English) | Developmenit of Silica-based PLC Coupler by TEOS Low Temperature Plasma CVD |
Sub Title (in English) | |
Keyword(1) | Silica based Planer Ligthwave Circuit (PLC) Coupler |
Keyword(2) | Wavelength Division Multiplex (WDM) |
Keyword(3) | Optical Filter |
Keyword(4) | CVD |
Keyword(5) | RlE |
1st Author's Name | F. Matsumura |
1st Author's Affiliation | Central Research Laboratories TOYO Communication Equipment Co.,Ltd() |
2nd Author's Name | H. Matumoto |
2nd Author's Affiliation | Central Research Laboratories TOYO Communication Equipment Co.,Ltd |
3rd Author's Name | K. Nakasendou |
3rd Author's Affiliation | Central Research Laboratories TOYO Communication Equipment Co.,Ltd |
4th Author's Name | H. Tanaka |
4th Author's Affiliation | Central Research Laboratories TOYO Communication Equipment Co.,Ltd |
5th Author's Name | Y. Fujii |
5th Author's Affiliation | College of Science and Technology, Nihon University |
Date | 1996/8/20 |
Paper # | EDM-96-36,CPM-96-59,OPE-96-58,LQE-96-60 |
Volume (vol) | vol.96 |
Number (no) | 218 |
Page | pp.pp.- |
#Pages | 6 |
Date of Issue |