| Presentation | 1996/6/21 Humidity Sensors Using Porous Anodized Film with Surface Modifications Kohtaro Nemoto, Supratic Chakraborty, Kazuhiro Hara, |
|---|---|
| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | It is well known that porous alumina films are sensitive to humidity change. This paper presents a new humidity sensor based on this film; Teflon or LiCl is deposited on it by ion beam deposition technique or by dipping it into an aqueous solution of LiCl respectively, after the deposition of thin Al_2O_3 film by rf sputtering. It is found that its sensitivity increases after the deposition of Teflon or LiCl. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Humidity sensors / Porous alumina / Anodized film / Lithium chloride / Teflon |
| Paper # | CPM96-38,OME96-25 |
| Date of Issue |
| Conference Information | |
| Committee | CPM |
|---|---|
| Conference Date | 1996/6/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
| Secretary | |
| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
|---|---|
| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Humidity Sensors Using Porous Anodized Film with Surface Modifications |
| Sub Title (in English) | |
| Keyword(1) | Humidity sensors |
| Keyword(2) | Porous alumina |
| Keyword(3) | Anodized film |
| Keyword(4) | Lithium chloride |
| Keyword(5) | Teflon |
| 1st Author's Name | Kohtaro Nemoto |
| 1st Author's Affiliation | College of Engineering, Tokyo Denki University() |
| 2nd Author's Name | Supratic Chakraborty |
| 2nd Author's Affiliation | College of Engineering, Tokyo Denki University |
| 3rd Author's Name | Kazuhiro Hara |
| 3rd Author's Affiliation | College of Engineering, Tokyo Denki University |
| Date | 1996/6/21 |
| Paper # | CPM96-38,OME96-25 |
| Volume (vol) | vol.96 |
| Number (no) | 121 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |