| Presentation | 1996/6/21 Dependence of gas sensitivity on micro-structures in SnO_2 thin films deposited by RF-sputtering Akira Kunimoto, Haruka Tamura, Yukio Nakanouchi, |
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| PDF Download Page | PDF download Page Link |
| Abstract(in Japanese) | (See Japanese page) |
| Abstract(in English) | The influence of RF-Sputtering conditions on the micro-structures in SnO_2 thin films were investigated, and the mechanism of gas sensitivity in that was studied. As a result, the micro-structure (morphology) of SnO_2 thin films were well affected by sputtering gas pressures. In this case, the granular size of SnO_2 and distance between each other increased as the pressure was increased. Moreover post-annealing for the films accelerated that tendancy. For the gas sensitivity, the more porous the film structure was, the higher the sensitivity was. However the gas response time was just opposite to that. From these results, the sensitivity in SnO_2 thin films remarkably depends on the film porosity and diffusivity into the films. |
| Keyword(in Japanese) | (See Japanese page) |
| Keyword(in English) | Gas-sensor / SnO_2 / Thin film / Sputtering / Micro-structure / Gas-sensitivity |
| Paper # | CPM96-29,OME96-16 |
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| Conference Information | |
| Committee | CPM |
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| Conference Date | 1996/6/21(1days) |
| Place (in Japanese) | (See Japanese page) |
| Place (in English) | |
| Topics (in Japanese) | (See Japanese page) |
| Topics (in English) | |
| Chair | |
| Vice Chair | |
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| Assistant | |
| Paper Information | |
| Registration To | Component Parts and Materials (CPM) |
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| Language | JPN |
| Title (in Japanese) | (See Japanese page) |
| Sub Title (in Japanese) | (See Japanese page) |
| Title (in English) | Dependence of gas sensitivity on micro-structures in SnO_2 thin films deposited by RF-sputtering |
| Sub Title (in English) | |
| Keyword(1) | Gas-sensor |
| Keyword(2) | SnO_2 |
| Keyword(3) | Thin film |
| Keyword(4) | Sputtering |
| Keyword(5) | Micro-structure |
| Keyword(6) | Gas-sensitivity |
| 1st Author's Name | Akira Kunimoto |
| 1st Author's Affiliation | Technological Research Center, Riken Corporation() |
| 2nd Author's Name | Haruka Tamura |
| 2nd Author's Affiliation | Technological Research Center, Riken Corporation |
| 3rd Author's Name | Yukio Nakanouchi |
| 3rd Author's Affiliation | Technological Research Center, Riken Corporation |
| Date | 1996/6/21 |
| Paper # | CPM96-29,OME96-16 |
| Volume (vol) | vol.96 |
| Number (no) | 121 |
| Page | pp.pp.- |
| #Pages | 6 |
| Date of Issue | |